Infineon Technologies Ag

Infineon Technologies Austria Ag

Roman Baburske

Johannes Georg Laven

Hans-Joachim Schulze

Christian Jaeger

Matteo Dainese

Thomas Basler

Alexander Philippou

Peter Lechner

Franz-Josef Niedernostheide

Antonio Vellei

Philip Christoph Brandt

Frank Dieter Pfirsch

Christian Philipp Sandow

Holger Schulze

Markus Bina

Maria Cotorogea

Josef Lutz

Oana Julia Spulber

Helmut Maeckel

Ralf Siemieniec

Stephan Voss

Hans-Juergen Thees

Franz Josef Niedernostheide

Benedikt Stoib

Vera Van Treek

Thomas Kimmer

Heiko Rettinger

Moritz Hauf

Roland Rupp

Werner Schustereder

Peter Irsigler

Daniel Domes

Moriz Jelinek

Peter Kanschat

Rudolf Berger

Andre Rainer Stegner

Holger Huesken

Thomas Gutt

Uwe Jansen

Christian Robert Mueller

Ingo Dirnstorfer

Riteshkumar Bhojani

Thorsten Arnold

Jana Hänsel

Judith Specht

Ilaria Imperiale

Katja Waschneck

Ute Queitsch

A power semiconductor device includes: a first load terminal at a first side, a second load terminal, and a semiconductor body coupled to the load terminals and configured to conduct a load current between the load terminals; and trenches at the first side and extending into the semiconductor body along a vertical direction. Each trench includes a trench electrode insulated from the semiconductor body by a trench insulator. Two trenches spatially confine a mesa portion. A semiconductor source region and semiconductor body region are in the mesa portion. A contact plug extends from the first side into the mesa portion and is arranged: in contact with the source and body regions; in contact with the trench insulator of one of the two trenches that spatially confine the mesa portion; and spaced apart from the trench insulator of the other one of the two trenches that spatially confine the mesa portion.

Mesa contact for MOS controlled power semiconductor device

A semiconductor switching module includes an insulated gate bipolar transistor and a unipolar switching device. The insulated gate bipolar transistor includes a first transistor cell and a supplemental cell, wherein the first transistor cell includes a first gate and a first source and wherein the supplemental cell includes a second gate and a supplemental electrode. The unipolar switching device is based on a wide bandgap material and includes a third gate and a third source. The third gate and the second gate are electrically connected with each other and are disconnected from the first gate. The first source, the supplemental cell and the third source are electrically connected with each other.

Semiconductor switching module with insulated gate bipolar transistor and unipolar switching device

A semiconductor device includes: a drift region of a first conductivity type in a semiconductor body having a first main surface; a body region of a second conductivity type between the drift region and the first main surface; and trenches extending into the semiconductor body from the first main surface and patterning the semiconductor body into mesas. The trenches include: a first trench having first and second electrodes that face one another along a lateral direction, and a dielectric arranged between the first and second electrodes; a second trench having first and second electrodes that face one another along a lateral direction, and a dielectric arranged between the first and second electrodes; and a third trench having first and second electrodes that face one another along a lateral direction, and a dielectric arranged between the first and second electrodes. Additional semiconductor device embodiments are described herein.

Semiconductor device including first gate electrode and second gate electrode

A power semiconductor device includes, an active area that conducts load current between first and second load terminal structures, a drift region, and a backside region that includes, inside the active area, first and second backside emitter zones one or both of which includes: first sectors having at least one first region of a second conductivity type contacting the second load terminal structure and a smallest lateral extension of at most 50 μm; and/or second sectors having a second region of the second conductivity type contacting the second load terminal structure and a smallest lateral extension of at least 50 μm. The emitter zones differ by at least of: the presence of first and/or second sectors; smallest lateral extension of first and/or second sectors; lateral distance between neighboring first and/or second sectors; smallest lateral extension of the first regions; lateral distance between neighboring first regions within the same first sector.

Power semiconductor device

A power semiconductor device having a barrier region is provided. A power unit cell of the power semiconductor device has at least two trenches that may both extend into the barrier region. The at least two trenches may both have a respective trench electrode coupled to a control terminal of the power semiconductor device. For example, the trench electrodes are structured to reduce the total gate charge of the power semiconductor device. The barrier region may be p-doped and vertically confined, i.e., in and against the extension direction, by the drift region. The barrier region can be electrically floating.

Power semiconductor device with dV/dt controllability and low gate charge

A power semiconductor device includes a semiconductor body coupled to first and second load terminals. The body includes: at least a diode structure configured to conduct a load current between the terminals and including an anode port electrically connected to the first load terminal and a cathode port electrically connected to the second load terminal; and drift and field stop regions of the same conductivity type. The cathode port includes first port sections and second port sections with dopants of the opposite conductivity type. A transition between each of the second port sections and the field stop region forms a respective pn-junction that extends along a first lateral direction. A lateral separation distance between immediately adjacent ones of second port sections in a second group is smaller than in a first group.

Diode structure of a power semiconductor device

A power semiconductor device first trench structures extending from a first main surface into a semiconductor body up to a first depth. The first trench structures extend in parallel along a first lateral direction. Each first trench structure includes a first dielectric and a first electrode. The power semiconductor device further includes second trench structures extending from the first main surface into the semiconductor body up to a second depth that is smaller than the first depth. The second trench structures extend in parallel along a second lateral direction and intersect the first trenches at intersection positions. Each second trench structure includes a second dielectric and a second electrode. The second dielectric is arranged between the first electrode and the second electrode at the intersection positions.

Power semiconductor device including first and second trench structures

A semiconductor device includes a drift region of a first conductivity type in a semiconductor body having a first main surface, and a body region of a second conductivity type between the drift region and the first main surface. Trenches extend into the semiconductor body from the first main surface and pattern the semiconductor body into mesas including a first mesa between first and second trenches, and a second mesa between second and third trenches. An electrode in the first trench is one electrode out of an electrode group of an electrode electrically coupled to a first gate driver output, an electrode electrically coupled to a second gate driver output, and an electrode electrically connected to a first load contact. An electrode in the second trench is another electrode out the electrode group, and an electrode in the third trench is a remaining electrode out of the electrode group.

A semiconductor device includes: a semiconductor region having charge carriers of a first conductivity type; a transistor cell in the semiconductor region; a semiconductor channel region in the transistor cell and having a first doping concentration of charge carriers of a second conductivity type, wherein a transition between the semiconductor channel region and the semiconductor region forms a first pn-junction; a semiconductor auxiliary region in the semiconductor region and having a second doping concentration of charge carriers of the second conductivity type. A transition between the semiconductor auxiliary region and semiconductor region forms a second pn-junction positioned deeper in the semiconductor region as compared to the first pn-junction. The semiconductor auxiliary region is positioned closest to the semiconductor channel region as compared to any other semiconductor region having charge carriers of the second conductivity type and that forms a further pn-junction with the semiconductor region.

Semiconductor device having a semiconductor channel region and a semiconductor auxiliary region

An power semiconductor device having a barrier region is provided. A power unit cell of the power semiconductor device has at least two trenches that may both extend into the barrier region. The at least two trenches may both have a respective trench electrode coupled to a control terminal of the power semiconductor device. For example, the trench electrodes are structured to reduce the total gate charge of the power semiconductor device. The barrier region may be p-doped and vertically confined, i.e., in and against the extension direction, by the drift region. The barrier region can be electrically floating.

A power device includes: a diode section; a semiconductor body; a drift region extending into the diode section; trenches in the diode section and extending along a vertical direction into the semiconductor body, two adjacent trenches defining a respective mesa portion in the semiconductor body; a body region in the mesa portions; in the diode section, a barrier region between the body and drift regions and having a dopant concentration at least 100 times greater than an average dopant concentration of the drift region and a dopant dose greater than that of the body region. The barrier region has a lateral structure according to which at least 50% of the body region in the diode section is coupled to the drift region at least by the barrier region, and at least 5% of the body region in the diode section is coupled to the drift region without the barrier region.

Diode with structured barrier region

A power semiconductor device includes: a semiconductor body; a first load terminal structure coupled to the body front side and a second load terminal structure coupled to the body backside; an active area for conducting a load current between the load terminal structures; a drift region having a first conductivity type; a backside region arranged at the backside and including, inside the active area, first and second backside emitter zones. At least one of the backside emitter zones includes: first sectors each having at least one first region of a second conductivity type, the first region arranged in contact with the second load terminal structure and having a smallest lateral extension of at most 50 &#x3bc;m; and/or second sectors each having a second region of the second conductivity type arranged in contact with the second load terminal structure and having a smallest lateral extension of at least 50 &#x3bc;m.

A semiconductor device is operable a forward current mode and a reverse current mode and comprises a semiconductor region, and a controllable charge carrier injector, and a gate. A method includes detecting, in the reverse current mode, if the present load current in the reversed direction does not exceed a threshold value, providing a gate signal such that the gate electrode causes the charge carrier injector to induce a first charge carrier density within the semiconductor region so as to conduct a nominal load current in the reverse direction; if the present load current in the reverse direction does exceed the threshold value, operating the semiconductor device in an overload state by providing the gate signal with a voltage that causes the semiconductor region to conduct an overload current in the reverse direction, wherein the second charge carrier density is higher than the first charge carrier density.

Semiconductor device having overload current carrying capability

An RC IGBT with an n-barrier region in a transition section between a diode section and an IGBT section is presented.

RC IGBT with an IGBT section and a diode section

A power semiconductor device includes a semiconductor body having front and back sides. The semiconductor body includes drift, field stop and emitter adjustment regions each of a first conductivity type. The field stop region is arranged between the drift region and the backside and has dopants of the first conductivity type at a higher dopant concentration than the drift region. The emitter adjustment region is arranged between the field stop region and the backside and has dopants of the first conductivity type at a higher dopant concentration than the field stop region. The semiconductor body has a concentration of interstitial oxygen of at least 1E17 cm. The field stop region includes a region where the dopant concentration is higher than that in the drift region at least by a factor of three. At least 20% of the dopants of the first conductivity type in the region are oxygen-induced thermal donors.

Growing community of inventors

Otterfing, Germany

Roman Baburske