Average Co-Inventor Count = 4.32
ph-index = 3
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. International Business Machines Corporation (14 from 164,108 patents)
14 patents:
1. 9652729 - Metrology management
2. 8736275 - Alignment correction system and method of use
3. 8680871 - Alignment correction system and method of use
4. 8451008 - Alignment correction system and method of use
5. 8411270 - Monitoring stage alignment and related stage and calibration target
6. 7937177 - Manufacturing work in process management system
7. 7853345 - Offset determination method for measurement system matching
8. 7742160 - Determining angle of incidence with respect to workpiece
9. 7646491 - Determining azimuth angle of incident beam to wafer
10. 7592817 - Alignment correction system and method of use
11. 7542136 - Flipping stage arrangement for reduced wafer contamination cross section and improved measurement accuracy and throughput
12. 7477365 - Optical spot geometric parameter determination using calibration targets
13. 7318206 - Offset determination for measurement system matching
14. 7248936 - Automated tool recipe verification and correction