International Business Machines Corporation

Globalfoundries Inc.

Globalfoudries Inc.

Roger Aime Dufresne

Fen Chen

Baozhen Li

Alvin Wayne Strong

Kai D Feng

Cathryn Jeanne Christiansen

Kevin W Kolvenbach

Michael Anthony Shinosky

Charles W Griffin

David G Brochu, Jr

Richard J St-Pierre

Timothy Dooling Sullivan

Barry P Linder

Yanfeng Wang

Ernest Y Wu

William A Klaasen

James H Stathis

Chorng-Lii Hwang

Travis S Merrill

Charles William Griffin

Methods and test structures for testing the reliability of a dielectric material. The test structure may include a first row of contacts and a line comprised of a conductor. The line is laterally spaced in a direction at a minimum distance from the first row of contacts. The test structure further includes a second row of contacts laterally spaced in the direction from the first row of contacts by a distance equal to two times a minimum pitch. The line is laterally positioned between the first row of contacts and the second row of contacts.

Test structures for dielectric reliability evaluations

Various particular embodiments include a via testing structure, including: a first terminal coupled to a first set of sensing lines in a top level of the structure; a second terminal coupled to a second set of sensing lines in the top level of the structure, wherein first set of sensing lines and the second set of sensing lines are disposed in a comb arrangement; a third terminal coupled to a third set of sensing lines in a bottom level of the structure; and a plurality of vias electrically coupling the second set of sensing lines in the top level of the structure to the third set of sensing lines in the bottom level of the structure, each via having a via top and a via bottom.

Via leakage and breakdown testing

Wiring structures with dummy metal features and methods of manufacture are disclosed. A structure includes a metal wiring structure, and dummy metal features in electrical and direct physical contact with the metal wiring structure in a same plane as the metal wiring structure. The dummy metal features do not change a resistance of the metal wiring structure and are remote from other structures.

Wiring structures

Disclosed are test structures and methods for non-planar field effect transistors. The test structures comprise test device(s) on an insulator layer. Each device comprises semiconductor fin(s). Each fin has a first portion comprising a pseudo channel region at one end and a second portion comprising a diffusion region positioned laterally adjacent to the first portion. A gate with sidewall spacers can be adjacent to the first portion of the fin(s). A first contact can be on the insulator layer adjacent the end of the fin(s). A second contact can be on the second portion of the fin(s) such that the gate is positioned laterally between the contacts. Measurements taken when the first contact is biased against the gate are compared to measurements taken when the second contact is biased against the gate in order to assess lateral dielectric breakdown between the gate and first contact independent of gate dielectric breakdown.

Non-planar field effect transistor test structure and lateral dielectric breakdown testing method

Kerf areas are located between the integrated circuit chips on a wafer. Via chain test structures are located in the kerf areas or test chips. The via chain test structures comprise a first conductor in a first area of the wafer. First via chains are connected at individual points to the first conductor. Each of the first via chains comprises an open-ended electrical circuit beginning at the first conductor and ending in an insulated region of a second area of the wafer. The via chain test structures comprise a second conductor in the second area. Second via chains are connected at individual points to the second conductor. Each of the second via chains comprises an open-ended electrical circuit beginning at the second conductor and ending in an insulated region of the first area.

Alternating open-ended via chains for testing via formation and dielectric integrity

An on-chip poly-to-contact process monitoring and reliability evaluation system and method of use are provided. A method includes determining a breakdown electrical field of each of one or more shallow trench isolation (STI) measurement structures corresponding to respective one or more original semiconductor structures. The method further includes determining a breakdown voltage of each of one or more substrate measurement structures corresponding to the respective one or more original semiconductor structures. The method further includes determining a space between a gate and a contact of each of the one or more original semiconductor structures based on the determined breakdown electrical field and the determined breakdown voltage.

On-chip poly-to-contact process monitoring and reliability evaluation system and method of use

A testing structure, system and method for monitoring electro-migration (EM) performance. A system is described that includes an array of testing structures, wherein each testing structure includes: an EM resistor having four point resistive measurement, wherein a first and second terminals provide current input and a third and fourth terminals provide a voltage measurement; a first transistor coupled to a first terminal of the EM resistor for supplying a test current; the voltage measurement obtained from a pair of switching transistors whose gates are controlled by a selection switch and whose drains are utilized to provide a voltage measurement across the third and fourth terminals. Also included is a decoder for selectively activating the selection switch for one of the array of testing structures; and a pair of outputs for outputting the voltage measurement of a selected testing structure.

Analyzing EM performance during IC manufacturing

An integrated circuit, testing structure, and method for monitoring electro-migration (EM) performance. A method is described that includes method for measuring on-chip electro-migration (EM) performance, including: providing a first on-chip sensor continuously powered with a stress current; providing a second on-chip sensor that is powered only during measurement cycles with a nominal current; obtaining a first resistance measurement from the first on-chip sensor and a second resistance measurement from the second on-chip sensor during each of a series of measurement cycles; and processing the first and second resistance measurements.

Real-time on-chip EM performance monitoring

Test structures for simultaneously testing for electromigration or stress migration fails and time dependent dielectric breakdown fails in integrated circuits, test circuits using four test structures arranged as a bridge balance circuit and methods of testing using the test circuits. The electromigration or stress migration portions of the test structures include via chains of wire segments connected in series by electrically conductive vias, the wire segments formed in at least two adjacent wiring levels of an integrated circuit. The time dependent dielectric breakdown portions of the test structures include digitized wire structures in one of the at least two adjacent wiring levels adjacent to a less than whole portion of the wire segments in the same wiring level as the digitized wire structures.

Test structure, method and circuit for simultaneously testing time dependent dielectric breakdown and electromigration or stress migration

A photodiode that exhibits a photo-induced negative differential resistance region upon biasing and illumination is described. The photodiode includes an N&plus; silicon substrate, a silicon nitride layer formed on the N&plus; silicon substrate, a reoxidized nitride layer formed on the silicon nitride layer and a N&plus; polysilicon layer formed on at least a portion of the reoxidized nitride layer.

Negative differential resistance reoxidized nitride silicon-based photodiode and method

The present invention is directed to an apparatus and method for reliability testing of an integrated circuit. The present invention provides a test structure and method for testing gate and node dielectrics of an integrated circuit wherein a self-heating gate structure is integrated with the product structure itself. Selected conductive lines within the product structure are used as heater elements to provide temperature stressing of the integrated circuit. The localized self-heating gate structure is an integral part of the product chip. Thus, etch and deposition characteristics of the test structure are kept identical to the etch and deposition characteristics of the product itself. As low-voltage technologies make it harder to obtain significant acceleration due to voltage stressing, temperature stressing may be used instead to increase acceleration.

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Fairfax, VT, United States of America

Roger Aime Dufresne