Average Co-Inventor Count = 2.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Advanced Micro-Fabrication Equipment, Inc. Asia (1 from 18 patents)
1 patent:
1. 7992518 - Silicon carbide gas distribution plate and RF electrode for plasma etch chamber