International Business Machines Corporation

Semitool, Inc.

Robert W Hitzfeld

Joseph John Fatula, Jr

Andrew Chiu

Richard Jule Contreras

Robert W Berner

Guillermo Prada-Silva

Rainer Schieferstein

Lubomyr Taras Romankiw

Panayotis Constantinou Andricacos

John Owen Dukovic

Matteo Flotta

Robert M Browne

Moritz Branger

Donald R McKenna

Benjamin W Fu

Saeed Sahami

A cathode current control system employing a current thief for use in electroplating a wafer is set forth. The current thief comprises a plurality of conductive segments disposed to substantially surround a peripheral region of the wafer. A first plurality of resistance devices are used, each associated with a respective one of the plurality of conductive segments. The resistance devices are used to regulate current through the respective conductive finger during electroplating of the wafer. Various constructions are used for the current thief and further conductive elements, such as fingers, may also be employed in the system. As with the conductive segments, current through the fingers may also be individually controlled. In accordance with one embodiment of the overall system, selection of the resistance of each respective resistance devices is automatically controlled in accordance with predetermined programming.

Cathode current control system for a wafer electroplating apparatus

An apparatus for rotary cathode electroplating having a head assembly, a substrate/thief assembly having a thieving ring which includes a number of individually chargeable segments, and a secondary induction assembly including a secondary core and a secondary winding. A motor drives the substrate/thief assembly to rotate relative to the head assembly. A controller directs electrical charge to each of the individually chargeable segments of the thieving ring. An electrical storage device stores electrical energy which is to be supplied to the controller. A charging apparatus induces a magnetic flux which induces an alternating current in the secondary winding of the secondary induction assembly. A converter converts the induced alternating current to direct current, which is then stored on the electrical storage device.

Apparatus for rotary cathode electroplating with wireless power transfer

A magnetic induction device having at least one secondary induction assembly including a secondary winding is mounted on a rotary element. A magnetic flux is induced the secondary induction assembly, causing an induced secondary alternating current in the secondary winding of the secondary induction assembly. The secondary alternating current is converting to direct current and is stored in an electrical storage device.

Apparatus for wireless transfer of power to a rotating element

The method and apparatus for supplying power to a rotary element by magnetic induction. A magnetic induction device having at least one secondary induction assembly including a secondary winding is mounted on the rotary element. A magnetic flux is induced the secondary induction assembly, causing an induced alternating current in the secondary winding of the secondary induction assembly. The secondary alternating current is converting to direct current and is stored in an electrical storage device. A rotary cathode plater is disclosed as a particular application of the apparatus by which power is transferred to a storage battery or high capacity capacitor, without the use of wires.

Rotary element apparatus with wireless power transfer

A multi-compartment electroplating system for electroplating two or more objects simultaneously such that the electrodeposited material is substantially uniform in thickness and composition. Electroplating solution is circulated between a reservoir and a multi-compartment tank which has one cathode-paddle-anode (CPA) assembly for each compartment. Each CPA assembly has an anode, a cathode adapted for holding a wafer and employing a single thieving electrode which covers all of the floor of the compartment not covered by the wafer, and a paddle. Also included is a cover which houses a single linear motor for driving all of the paddles in synchrony.

Multi-compartment eletroplating system

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San Jose, CA, United States of America

Robert W Hitzfeld