Average Co-Inventor Count = 4.44
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Lam Research Corporation (2 from 3,768 patents)
2 patents:
1. 6224461 - Method and apparatus for stabilizing the process temperature during chemical mechanical polishing
2. 6186865 - Apparatus and method for performing end point detection on a linear planarization tool