Motorola Corporation

Robert Dwayne Colclasure, Jr

Wayne M Paulson

Gong Chen

David Kerszykowski

Raymond Leo Miller, Jr

John Michael Garbayo

A computer system (,) and method for automating manufacture of a photomask. The computer system (,) has a product database (,) that stores information used to manufacture the photomask. In addition, a semiconductor device is manufactured using the information stored in the product database (,). The information is transmitted to the product database (,) from semiconductor satellite systems such as a fabrication facility (,), a first mask shop (,), and a second mask shop (,). The computer system (,) chooses a mask shop for producing the photomask by using the information transmitted form the first mask shop (,) and the second mask shop (,).

Method for automating manufacture of photomask

A multi-level registration control system for a photolithography process includes a photolithography device that prints first, second and third layers on a wafer. A first overlay mark defines overlay errors in a first direction between the first and third layer. The first overlay mark also defines overlay errors between the second and third layers. An overlay measurement device measures the overlay errors and generates an overlay signal. A feedback controller is connected to the overlay measurement device and the photolithography device. The feedback controller receives the overlay error signal and generates and transmits an alignment correction signal to the photolithography device. The first overlay mark is a box-in-box overlay mark or a frame-in-frame overlay mark. By providing a single overlay mark to align three layers, the multi-layer overlay control system reduces scribe grid area and saves useful silicone surface area.

Growing community of inventors

Mesa, AZ, United States of America

Robert Dwayne Colclasure, Jr