Applied Materials, Inc.

Applied Materials Israel Limited

Orbot Instruments Ltd.

Rivka Sherman

Ehud Tirosh

Gad Neumann

David Alumot

A method and apparatus for inspecting the surface of articles, such as chips and wafers, for defects, includes a first phase of optically examining the complete surface of the article inspected at a relatively high speed and with a relatively low spatial resolution, and a second phase of optically examining with a relatively high spatial resolution only the suspected locations for the presence or absence of a defect therein.

Optical inspection apparatus for substrate defect detection

Optical inspection method for substrate defect detection

Substrate inspection method and apparatus

Optical inspection method and apparatus

A method and apparatus for inspecting the surface of articles, such as chips and wafers, for defects, includes a first phase of optically examining the complete surface of the article inspected by scanning its complete surface at a relatively high speed and with an optical beam of relatively small diameter, particularly a laser beam, and a second phase of optically examining with a relatively high spatial resolution only the suspected locations for the presence or absence of a defect therein.

Two-phase optical inspection method and apparatus for defect detection

Growing community of inventors

Ramat Hasharon, Israel

Rivka Sherman