International Business Machines Corporation

Richard Mars Ruggiero

Leping Li

Steven G Barbee

Arnold Halperin

William Joseph Surovie

An apparatus for rotary signal coupling in in-situ monitoring of a chemical-mechanical polishing process by a polisher is provided with a sensor fixed to a rotatable wafer carrier for creating a signal responsive to the chemical mechanical polishing process, a conductor coupled to the sensor for receiving the signal, the conductor fixed to the rotatable wafer carrier, a contact coupled to the conductor, the contact fixed to a stationary drive arm, and signal transfer means coupled to the contact for transferring the signal to a monitoring means.

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Danbury, CT, United States of America

Richard Mars Ruggiero