USA As Represented by Secretary of the Navy

Bae Systems Information and Electronic Systems Integration Inc.

Reed K Lawrence

Harold L Hughes

Patrick J McMarr

Nadim F Haddad

Bernard J Mrstik

A circuit and method are provided in which a six-transistor (6-T) SRAM memory cell is hardened to single-event upsets by adding isolation-field effect transistors ('iso-fets') connected between the reference voltage Vdd and the field-effect transistors ('fets') respectively corresponding to first and second inverters of the memory cell. According to certain embodiments, the control gates of first and second P-iso-fets are respectively tied to the control gates of first and second pull-up P-fets. According to certain embodiments, first and second N-iso-fets are connected between the output nodes of the memory cell and the pull-down N-fets respectively corresponding to the first and second inverters. The control gates of the first and second N-iso-fets are respectively tied to the control gates of the first and second pull-down N-fets. Again according to certain embodiments, one or more of the iso-fets are physically removed from the proximity of other transistors which comprise the memory cell.

Single-event upset immune static random access memory cell circuit

Oxide films are deposited under conditions generating a silicon-rich oxide in which silicon nanoclusters form either during deposition or during subsequent annealing. Such deposition conditions include those producing films with optical indices (n) greater than 1.46. The method of the present invention reduces the TID radiation-induced shifts for the oxides.

Technique to radiation-harden trench refill oxides

Single-event upset immune static random access memory cell circuit, system, and method

This invention concerns a non-volatile memory device with a polarizable layer. The apparatus concerns a substrate, a buried oxide layer within the substrate, and a polarizable layer within the substrate. The polarizable layer is formed in a buried oxide layer of a silicon-on-insulator substrate for the fabrication of non-volatile memory. The process of creating the polarizable layer comprises implanting, through the active silicon layer, Si ions into the buried oxide layer at an ion implantation energy selected so that the implanted ion has its peak concentration between 5&#x2013;50 nm from the silicon/buried oxide interface. The implantation step can occur while externally heating the silicon-on-insulator substrate at a temperature between 25&#x2013;300 degrees Celsius. An annealing step may be completed to repair any damage the implantation may have created in the silicon-on-insulator substrate.

Non-volatile memory device with a polarizable layer

This invention concerns a process of forming a polarizable layer in a buried oxide layer of a silicon-on-insulator substrate for the fabrication of non-volatile memory. This process comprises implanting, through the active silicon layer, Si ions into the buried oxide layer at an ion implantation energy selected so that the implanted ion has its peak concentration between 5-50 nm from the silicon/buried oxide interface. The implantation step can occur while externally heating the silicon-on-insulator substrate at a temperature between 25-300 degrees Celsius. After implantation, an annealing step may be completed to repair any damage the implantation may have created in the silicon-on-insulator substrate.

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Purcellville, VA, United States of America

Reed K Lawrence