Ultratech, Inc.

Peer Intellectual Property Inc.

Ray Ellis

Emily M True

Jim Woodruff

Scott Kulas

Joe Jamello

Albert J Crespin

Shiyu Zhang

Evzen Wagner

Charles Bayliss

Toni Asyst Technologies Inc Gucker

Tim Yoas

Methods and apparatuses are provided for positioning a substrate having a target that may be located on either the front-side or the backside of the substrate. The optical detector that views the target contains a signal-generating material that is substantially identical to the substrate material.

Substrate-alignment using detector of substrate material

An apparatus for measuring the relative positions of frontside and backside alignment marks located on opposite sides of a substrate is disclosed. The apparatus includes upper and lower optical systems that allow for simultaneous imaging of frontside and backside alignment marks. The frontside and backside alignment mark images are processed to determine the relative position of the marks, as a measurement of the alignment and/or overlay performance of the tool that formed the marks on the substrate.

Dual-sided substrate measurement apparatus and methods

A method and apparatus are disclosed for improving the implementation of automated job management for equipment in a factory. A software library is provided that allows a job management client, such as a thin station controller client, to communicate with an equipment server, such as an equipment interface bridge (EIB). The job management client can create, control and monitor jobs conveniently and efficiently utilizing industry standard protocols. The equipment server communicates directly in real-time with factory equipment. By providing an interface between a job management client and an equipment server, data consumer clients are effectively decoupled from job management clients, allowing next generation station controllers for monitoring and controlling equipment processing to be easily implemented. Layers of expensive and complex code currently in use for job management can be replaced with a superior and cost-effective thin-client, distributed architecture. Such a system may operate in conjunction with legacy station controllers, or the station controller can be eliminated and replaced by multiple modules that distribute the many types of functions typically incorporated into conventional station controllers.

Automated job management

Growing community of inventors

Fremont, CA, United States of America

Ray Ellis