Aes Global Holdings Pte Ltd.

Randy Grilly

Daniel John Hoffman

Daniel Carter

Karen Peterson

Scott Polak

Mike Thornton

This disclosure describes a remote plasma source, a gas input manifold, and related methods of making and using. In some examples, a remote plasma source is provided with a plasma chamber, a gas input manifold, and an output region. The remote plasma source also has means for introducing a gas into the plasma chamber, the means for introducing configured to impart a radial velocity and a longitudinal velocity on the gas, relative to a longitudinal axis through the remote plasma source.

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Pierce, CO, United States of America

Randy Grilly