Mannesmann Aktiengesellschaft

Degussa Gmbh

Sensycon

Ralf Huck

Wolfgang Muller

Eckert

A process for producing a thin-film measurement resistor in which an electrically insulating work material with a low specific heat capacity serves as substrate material, a metal film, preferably platinum, being applied thereto. The lateral electrical resistor is then structured and trimmed by erosive after-treatment, and the metal film is passivated in a final process step. The resistor element reacts more quickly to changes in temperature, the cover layer is extremely resistant to corrosion, and the entire construction is simple to produce in that glass is used as a substrate material and is provided, before applying the metal film, with a bonding agent layer of Al.sub.2 O.sub.3 which is substantially thinner than the metal film. The metal film is then applied by evaporation and structured by sputter etching. Finally, the metal film is provided with a protective coat of SiO.sub.x.

Thin-film measurement resistor and process for producing same

An anemometer having a substrate onto which a temperature-dependent surface resistor is deposited. The active surface of the surface resistor is spaced from the leading edge of the substrate. A covering layer extends over the surface resistor and extends to the substrate at least in the area of the active surface.

Direct-intake air measuring apparatus

A pressure sensor (38) is proposed with strain gauges (18, 20, 22, 24) such as thick-film resistance strain gauges arranged on a diaphragm, these gauges being preferably connected to form a Wheatstone bridge, where branches of the bridge circuit have compensating resistors (26, 28, 30, 32). The compensating resistors are arranged outside the active area (17) of the diaphragm.

Growing community of inventors

Hanau, Germany

Ralf Huck