Ams Ag

Ev Group Gmbh

Raimund Hoffmann

Franz Schrank

Gerhard Eilmsteiner

Ronald Holzleitner

Johanna Bartel

Jordi Teva

The method comprises the steps of applying a layer of a negative photoresist on a bottom layer, providing the layer of the negative photoresist with a pattern arranged in a border zone of the resist structure to be produced, irradiating a surface area of the layer of the negative photoresist according to the resist structure to be produced, and removing the layer of the negative photoresist outside the irradiated surface area. The pattern is produced in such a manner that it comprises a dimension that is smaller than a minimal resolution of the irradiation. The pattern may especially be designed as a sub-resolution assist feature.

Growing community of inventors

Soeding, Austria

Raimund Hoffmann