Varian Semiconductor Equipment Associates, Inc.

Raees Pervaiz

Shurong Liang

Tyler Burton Rockwell

Glen F R Gilchrist

Kenneth L Starks

A method may include generating a plasma in a plasma chamber, the plasma comprising an etchant species and extracting a pulsed ion beam from the plasma chamber and directing the pulsed ion beam to a substrate, where the pulsed ion beam comprises an ON portion and an OFF portion. During the OFF portion the substrate may not be biased with respect to the plasma chamber, and the duration of the OFF portion may be less than a transit time of the etchant species from the plasma chamber to the substrate.

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Hampton, NH, United States of America

Raees Pervaiz