Applied Materials, Inc.

Radel Ben-Av

Pavel Adamec

Igor Petrov

Asher Pearl

Jimmy Vishnipolsky

Alex Goldenshtein

Nadav Haas

Yaron I Gold

David Aviel

The present invention provides, according to a first aspect, a method for the examination of specimen with a beam of charged particles. The method provides one or more images of the specimen made with different view angles, so that, compared to a single image of the specimen, a lot of additional information about the specimen can be accessed. The different view angles (angles of incidence) are achieved by tilting the beam between the two images and moving the specimen to a new position so that the displacement of the beam caused by the tilting of the beam is compensated. Accordingly, while displaying/recording the second image the beam scans over the same area as it has scanned while displaying/recording the first image.

Method and system for the examination of specimen

A method for scanning a specimenwith beamsof charged particles of a source group. Thereby, a plurality of target pointsis scanned with a charged particle beam emitted by a sourceand the same plurality of target points is scanned with at least one further charged particle beam emitted by at least one further source. Further, the charged particle beams from the source and the at least one further source are emitted on the same target point at different times. Additionally, a multiple charged particle beam source and a data feed system are provided. A source arraycomprises at least one logical emitting unit, wherein patterning information is shifted in a shift circuit, and redundancy emitting units, wherein individual redundancy emitting units obtain patterning information from the shift register.

Method and device for rastering source redundancy

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Rehovot, Israel

Radel Ben-Av