Average Co-Inventor Count = 2.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Intel Corporation (3 from 54,688 patents)
3 patents:
1. 6642141 - In-situ silicon nitride and silicon based oxide deposition with graded interface for damascene application
2. 6507081 - In-situ silicon nitride and silicon based oxide deposition with graded interface for damascene application
3. 6255233 - In-situ silicon nitride and silicon based oxide deposition with graded interface for damascene application