Average Co-Inventor Count = 3.43
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Cabot Microelectronics Corporation (2 from 297 patents)
2. Cmc Materials, Inc. (33 patents)
2 patents:
1. 9597768 - Selective nitride slurries with improved stability and improved polishing characteristics
2. 9422455 - CMP compositions exhibiting reduced dishing in STI wafer polishing