Taiwan Semiconductor Manufacturing Comp. Ltd.

Ping-Chung Liu

Kuo Hui Chang

Wei-Chiang Hung

Hsiang-Yu Tsai

A semiconductor structure includes a semiconductor substrate; a gate stack on the semiconductor substrate; and a stress memorization technology (SMT) sidewall spacer over a sidewall of the gate stack. The gate stack includes a gate dielectric layer over the semiconductor substrate and a gate electrode over the gate dielectric layer. The SMT sidewall spacer provides a stress for a channel region beneath the gate stack.

Growing community of inventors

Taipei, Taiwan

Ping-Chung Liu