International Business Machines Corporation

Phillip Francis Chapman

Steven H Voldman

David S Collins

John Edward Cronin

Rajendran Krishnasamy

David Goren

Shlomo Shlafman

Benny Sheinman

Raminderpal Singh

Richard E Wistrom

Daniel Shaw Brooks

Wayne H Woods

Jeffrey P Gambino

Mark David Jaffe

Bradley Alan Orner

Robert L Barry

Kevin N Ogg

Michael Lawrence Gautsch

A method of manufacturing a semiconductor structure includes: forming a trench in a back side of a substrate; depositing a dopant on surfaces of the trench; forming a shallow trench isolation (STI) structure in a top side of the substrate opposite the trench; forming a deep well in the substrate; out-diffusing the dopant into the deep well and the substrate; forming an N-well and a P-well in the substrate; and filling the trench with a conductive material.

Structure and method of latchup robustness with placement of through wafer via within CMOS circuitry

Disclosed are guard ring structures with an electrically insulated gap in a substrate to reduce or eliminate device coupling of integrated circuit chips, methods of manufacture and design structures. The method includes forming a guard ring structure comprising a plurality of metal layers within dielectric layers. The method further includes forming diffusion regions to electrically insulate a gap in a substrate formed by segmented portions of the guard ring structure.

Segmented guard ring structures with electrically insulated gap structures and design structures thereof

A novel and useful apparatus for and method of providing noise isolation between integrated circuit devices on a semiconductor chip. The invention addresses the problem of noise generated by digital switching devices in an integrated circuit chip that may couple through the silicon substrate into sensitive analog circuits (e.g., PLLs, transceivers, ADCs, etc.) causing a significant degradation in performance of the sensitive analog circuits. The invention utilizes a deep trench capacitor (DTCAP) device connected to ground to isolate victim circuits from aggressor noise sources on the same integrated circuit chip. The deep penetration of the capacitor creates a grounded shield deep in the substrate as compared with other prior art shielding techniques.

Bias-controlled deep trench substrate noise isolation integrated circuit device structures

A design structure including: an I/O cell and an ESD protection circuit in a region of an integrated circuit chip containing logic circuits; an electrically conductive through via extending from a bottom surface of the substrate toward a top surface of the substrate between the I/O cell and an ESD protection circuit and at least one of the logic circuits.

Structure for a latchup robust array I/O using through wafer via

A structure and a method for preventing latchup. The structure including: an I/O cell and an ESD protection circuit in a region of an integrated circuit chip containing logic circuits; an electrically conductive through via extending from a bottom surface of the substrate toward a top surface of the substrate between the I/O cell and an ESD protection circuit and at least one of the logic circuits.

Latchup robust array I/O using through wafer via

A structure, method and a design structure for preventing latchup in a gate array. The design structure including: a NFET gate array and a PFET gate array in a substrate; an electrically conductive through via extending from a bottom surface of the substrate toward a top surface of the substrate the NFET gate array and PFET gate array, the through via electrically contacting the P-well.

Structure for a latchup robust gate array using through wafer via

A design methodology is disclosed for optimizing guard ring design by optimizing the guard ring to power supply path resistance value between physical and/or virtual injection sources in a CMOS circuit and the corresponding power supply. By comparing the calculated guard ring to power supply path resistance value to resistance criteria derived from specifications, elements that need further redesign are identified. Repeated redesign with several redesign options eventually lead to an optimized guard ring structure that provides area-efficient and sufficient latchup protection for the CMOS circuit.

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Colchester, VT, United States of America

Phillip Francis Chapman