Average Co-Inventor Count = 7.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Imec Vzw (1 from 960 patents)
2. Interuniversitair Microelektronica Centrum (imec) (1 from 178 patents)
2 patents:
1. 6255227 - Etching process of CoSi2 layers
2. 6153484 - Etching process of CoSi.sub.2 layers