International Business Machines Corporation

Philip L Campbell

Edward Sherwood

Uldis Artis Ziemins

David J Pinckney

Paul D Hand

Francis F Szenher

Denise B Joe

A system for reading substrate carriers that includes at least one overhead transport vehicle (OHT) utilizing at least one device for at least one of sensing and/or reading a substrate carrier, and/or wafers arranged therein, when the substrate carrier is proximate the at least one overhead transport vehicle. A method of sensing or reading a substrate carrier includes sensing and/or reading a substrate carrier and/or wafers arranged therein with the overhead transport vehicle.

Semiconductor automation buffer storage identification system and method

A combination of a FOUP (front opening unified pod) system and a reticle system utilized for the transport of wafers and a reticle system, the latter of which are used for transporting reticles from a first fabrication site to a further site at another location, and which provides for a unified system enabling the automated and trackable delivery of the reticles between these sites. Provided is a modified FOUP base structure, which is adapted to retain a reticle and to be able to employ existing equipment in a fabrication site which only necessitates a minimal modification of the equipment in order to render the latter universally adaptable to the combination of the systems.

Reticle storage pod (RSP) transport system utilizing FOUP adapter plate

A system and storage medium for providing continuous communication between passive and active equipment are provided. The system includes a conversion unit coupled to at least one the passive and active equipment, which monitors signals received from the equipment. The signals relate to an equipment state. Upon detecting a state change, the system converts a signal associated with the state change to a TCP/IP-formatted request. The system also includes a message handler coupled to the conversion unit, which receives the request from the conversion unit and transmits the request to a host system. The message handler also removes TCP/IP formatting from the request resulting in a file transfer protocol message. The conversion unit converts the file transfer protocol message to a signal and responds to the signal by the equipment. The conversion includes decoding the file transfer protocol message and setting a signal line to a requested state.

Method, system, and storage medium for providing continuous communication between process equipment and an automated material handling system

A steering apparatus and method is implemented that allows high speed, clean, particle-free transport of a semiconductor wafer or lithographic reticle on a transport vehicle at various positions on the vehicle track, especially when entering and exiting turns. Three computer-controlled electro-magnets are mounted at the left, center, and right side of a front steering truck, and are energized to attract strategically placed permanent magnet material mounted on a side of the track where the vehicle enters or exits a turn. The transport vehicle can be levitated by an air cushion or travel on wheels, and controlled by electromotive or electromagnetic forces about the track. Using the steering electro-magnets as a LVDT, a computer processor monitors the location of the transport vehicle about the track.

Apparatus and method for steering transport vehicles in semiconductor processing

Exemplary embodiments of the invention include a method and system for providing continuous communication between passive equipment and active equipment. The method includes monitoring signals received from a passive equipment or active equipment. The signals relate to at least one equipment state. Upon detecting a state change, the method also includes converting a signal associated with the state change to a TCP/IP-formatted request, and transmitting the request to a host system.

Communication between a controller and a set of automated vehicles is improved by use of an RF link that employs a high frequency spread spectrum modem that establishes a low noise link in a high noise industrial environment and also shares the relevant frequency range with a wireless telephone system.

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Millbrook, NY, United States of America

Philip L Campbell