United States of America As Represented by the Administrator of Nasa

Peter C Nagler

Kevin L Denis

John E Sadleir

Manuel A Balvin

Thomas R Stevenson

A method of forming low-energy x-ray absorbers. Sensors may be formed on a semiconductor, e.g., silicon, wafer. A seed metal layer, e.g., gold, is deposited on the wafer and patterned into stem pads for electroplating. Stems, e.g., gold, are electroplated from the stem seed pads through a stem mask. An absorber layer, e.g., gold, is deposited on the wafer, preferably e-beam evaporated. After patterning the absorbers, absorber and stem mask material is removed, e.g., in a solvent bath and critical point drying.

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College Park, MD, United States of America

Peter C Nagler