Taiwan Semiconductor Manufacturing Comp. Ltd.

Pei-Wen Wu

Ming-Hsing Tsai

Chi-Cheng Hung

Yu-Sheng Wang

Jyh-Cherng Sheu

Chun-I Tsai

A metal adhesion layer may be formed on a bottom and a sidewall of a trench prior to formation of a metal plug in the trench. A plasma may be used to modify the phase composition of the metal adhesion layer to increase adhesion between the metal adhesion layer and the metal plug. In particular, the plasma may cause a shift or transformation of the phase composition of the metal adhesion layer to cause the metal adhesion layer to be composed of a (111) dominant phase. The (111) dominant phase of the metal adhesion layer increases adhesion between the metal adhesion layer.

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Hsinchu County, Taiwan

Pei-Wen Wu