Fei Comapny

Pavel Poloucek

Tomás Vystavel

Michal Hrouzek

Lubomir Tuma

Martin Cafourek

Tomáš Trnkócy

Josef Sesták

Petronella Catharina Maria Baken

Ernst Jan Ruben Vesseur

Ernst Jan Vesseur

Ellen Baken

The invention relates to a method of manipulating a sample in an evacuated chamber of a charged particle apparatus, the method performed in said evacuated chamber, the method including: providing a sample on a first substrate; bringing an extremal end of a manipulator in contact with the sample; attaching the sample to said extremal end, the attaching being a removable attaching; lifting the sample attached to the extremal end of the manipulator from the first substrate and transport the sample to a second substrate; attaching the sample to the second substrate; and detaching the sample from the extremal end of the manipulator. At least one of the steps of attaching the sample being performed solely by bringing the sample into contact with a bundle of carbon nanotubes.

Method of manipulating a sample in an evacuated chamber of a charged particle apparatus

A specimen holder for a Charged Particle Microscope is disclosed. The holder has a support structure with an elongated member including a specimen mounting zone. The specimen mounting zone comprises a rotor with an axis perpendicular to the elongated member with a paddle connected to it which may be rotated. Specimens may be mounted on the paddle so that rotation of the paddle allows specimens to be rotated and/or inverted for microscopic observation on both sides. Specimens may either be directly mounted on the paddle, or on a grid, half-moon grid, lift-out grid, aperture frame, dielectric film, etc.

Specimen holder for a charged particle microscope

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Brno, Czechia

Pavel Poloucek