Mitutoyo Corporation

Pavel Ivanovich Nagornykh

Paul Gerard Gladnick

Christopher Richard Hamner

A metrology system is provided including a lighting configuration and camera which are controlled to acquire image stacks of a workpiece, wherein each image stack is acquired utilizing different lighting (e.g., corresponding to different lighting positions). Sets of pixel intensity values from the image stacks are utilized to determine a composite stack which includes one pixel intensity value for each pixel position and focus position. At least some of the pixel intensity values of the composite stack are determined according to a glare reduction process which determines a corresponding pixel intensity value for the composite stack that is less than a maximum pixel intensity value of the corresponding set of pixel intensity values. Focus curve data is determined based at least in part on the pixel intensity values of the composite stack, wherein the focus curve data indicates three dimensional positions of a plurality of surface points on the workpiece.

Metrology system utilizing points-from-focus type processes with glare reduction

A metrology system includes front and back vision components portions, and is configured to have a workpiece positioned between the two portions. The back vision components portion includes a light source and a diffuser. The front vision components portion includes a variable focal length lens, an objective lens and a camera. The metrology system includes a movement mechanism portion configured to align relative positions between the front and back vision components portions and an aperture defined through the workpiece such that at least a portion of the light from the light source that passes through the diffuser passes through the aperture for providing the illumination for imaging the aperture. The camera acquires an image stack of images of the aperture at different focus positions. Based on an analysis of the image stack, measurements related to workpiece features of the aperture (e.g., including a distance between workpiece features) can be determined.

Metrology system configured to illuminate and measure apertures of workpieces

A method provides distance calibration data for a chromatic range sensor system with a chromatic range sensor optical pen configured to focus different wavelengths at different distances along a distance measurement axis. The chromatic range sensor optical pen is arranged in a relationship relative to a spherical calibration object that has a nominally spherical calibration surface. Relative movement of the chromatic range sensor optical pen in relation to the nominally spherical calibration surface is controlled so as to perform a spiral scan of a portion of the nominally spherical calibration surface. Distance indicating data is determined as corresponding to the distances between the chromatic range sensor optical pen and surface points on the nominally spherical calibration surface as the spiral scan is performed. Distance calibration data for the chromatic range sensor system is determined based on the distance indicating data.

Chromatic range sensor system with spherical calibration object and method

A chromatic point sensor (CPS) optical pen provides a signal usable to measure a distance to a surface, and includes an axial chromatic aberration portion arranged to receive source radiation from an aperture, output it toward the surface as a focused measurement beam having axial chromatic dispersion, receive reflected radiation from the surface and focus it proximate to the aperture. The axial chromatic aberration portion includes a first axially dispersive focusing element that receives the source radiation and focuses it at a first focal region, a second axially dispersive focusing element that receives the radiation from the first focal region and focuses it at a second focal region, and a third axially dispersive focusing element that receives the radiation from the second focal region and outputs the measurement beam. Lengths between the first, second and third axially dispersive focusing elements are adjustable (i.e., resulting in an adjustable range).

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Kirkland, WA, United States of America

Pavel Ivanovich Nagornykh