Applied Materials, Inc.

Paul Bocian

Shinichi Kurita

Matthias Brunner

Emanuel Beer

Benjamin M Johnston

Ralf Schmid

Fayez (Frank) E Abboud

Fayez E Abboud

A method of testing electronic devices on substrates is described. The method includes placing a configurable prober over a first substrate, testing the first substrate, re-configuring the configurable prober, placing the configurable prober over a second substrate, and testing the second substrate.

Configurable prober for TFT LCD array test

An improved prober for an electronic devices test system is provided. The prober is 'configurable,' meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, 'x' and &#x201c;y&#x201d; axes are defined by the frame. The electrical pins may be movable along the axial length of the prober bars, or may be selectively pushed down to contact selected contact pads on the substrate.

An improved prober for an electronic devices test system is provided. The prober is 'configurable,' meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, 'x' and &#x201c;y&#x201d; axes are defined by the frame.

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Saratoga, CA, United States of America

Paul Bocian