Exactus, Inc.

Patrick J Nystrom

Ronald A Palfenier

A radiometric system () typically used in semiconductor wafer processing has reduced optical losses, improved wavelength selectivity, improved signal to noise, and improved signal processing to achieve wafer temperature measurements from about 10&#xb0; C. to 4,000&#xb0; C. A YAG rod collection optic () directly couples specimen radiation () to a filter () and photo detector (). The filter determines which radiation wavelengths are measured, and optionally includes a hot/cold mirror surface () for reflecting undesired radiation wavelengths back to the specimen. The detector is formed from doped GaAlAs having a peaked response near 900 nm. A signal processor () converts the signal into a temperature reading.

Radiometric temperature measurement system

A radiometric detector ( ) has reduced optical losses, improved wavelength selectivity, improved signal to noise, and improved signal processing methods to achieve temperature measurements of an object ( ) from about 10&deg; C. to 4,000&deg; C. A YAG rod collection optic ( ) directly couples object radiation ( ) to a filter ( ) and photo detector ( ). The filter determines which radiation wavelength range is measured, and optionally includes a hot/cold mirror surface ( ) for reflecting undesired radiation wavelengths back to the specimen. In a preferred measurement method, at least two detectors are employed, each detecting a different wavelength range. A dual-wavelength temperature measurement computation is employed that is independent of radiation transmission losses and the emissivity of the object being measured.

Method of optical pyrometry that is independent of emissivity and radiation transmission losses

A radiometric system ( ) typically used in semiconductor wafer processing has reduced optical losses, improved wavelength selectivity, improved signal to noise, and improved signal processing to achieve wafer temperature measurements from about 10&deg; C. to 4,000&deg; C. A YAG rod collection optic ( ) directly couples specimen radiation ( ) to a filter ( ) and photo detector ( ). The filter determines which radiation wavelengths are measured, and optionally includes a hot/cold mirror surface ( ) for reflecting undesired radiation wavelengths back to the specimen. The detector is formed from doped GaAlAs having a peaked response near 900 nm. A signal processor ( ) converts the signal into a temperature reading.

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Gresham, OR, United States of America

Patrick J Nystrom