Nikon Corporation

Nikon Metrology Nv

Patrick Blanckaert

Frank Thys

Raf Nysen

Daisuke Kitazawa

Geert Vandenhoudt

The present invention relates to a scanning probe () for the dimensional acquisition of an object () by irradiating the object () with light and detecting reflected light comprising: a detection unit () comprising an imaging sensor () and a sensor lens assembly () for detecting the reflected light, a light projecting unit () comprising a light source () for generating light, and source optics () for focusing the light, and light plane generating optics () for generating a light plane () for irradiating the object, and an adjustment mechanism () comprised in the light projecting unit (), for adjusting the position or orientation of the light plane relative to the detection unit. It further relates to a method for assembly of a scanning probe ().

Optical scanning probe

There is provided a measuring apparatus including: an imaging optical system configured to form an image of an object to be measured; and an imaging section including a transmissive member which is arranged in the vicinity of an image plane of the imaging optical system to be inclined with respect an optical axis of the imaging optical system. The imaging optical system includes a first optical member which is non-coaxial with respect to the optical axis.

Growing community of inventors

Boortmeerbeek, Belgium

Patrick Blanckaert