Hitachi, Ltd.

Hitachi-high-technologies Corporation

Opnext Japan, Inc.

Hitachi Construction Machinery Co., Ltd.

Osamu Yamada

Eiichi Hazaki

Hideo Todokoro

Yoshikazu Inada

Yasuhiro Mitsui

Takashi Furukawa

Yasushi Nakaizumi

Susumu Kato

Osamu Satou

Hiroshi Yanagita

Yoichi Ose

Makoto Ezumi

Masatsugu Kametani

Kenjiro Yamamoto

Taku Ninomiya

Shigeru Tokita

Tomohiro Kudo

Toshikazu Ohtake

Katsuhisa Ike

Shou Takami

Mitsugu Sato

Mikio Tokuyama

Tadashi Otaka

Sumio Hosaka

Isamu Yoshida

Yasuhiko Nara

Kazumi Kawamoto

Shigeyuki Hosoki

Hiroaki Furuichi

Naoki Sakamoto

Tsutomu Saito

Akira Hashimoto

Toshihiro Furuya

Koichiro Takeuchi

Toshihiko Wada

Katsumi Kuroguchi

Akito Tanokuchi

Shigenobu Maruyama

Hiroyoshi Ishii

Hirofumi Sato

Fumihide Maeda

Akimitsu Okura

Shigeru Haneda

Yasunori Iwafuji

Masashi Shibahara

Satoshi Motohiro

Tarou Tonoduka

Tooru Yoshida

Shinobu Otsuka

Tsutomu Kuroiwa

Katsuya Ohno

Yoshinori Numata

Hiroshi Ibe

Katsuya Oono

Toshikazu c/o Hitachi Comm Systmes Inc Ohtake

A stage comprises a linear guide rail () for guiding a movable table (), a driven bar (), a linear drive actuator in contact with the driven bar () to transmit driving force to the driven bar (), and parallel plate springs () for holding opposite ends of the driven bar (). A drive transmitting surface of the linear drive actuator is provided so as to be separated from the movable table (), and this prevents the accuracy of positioning from being reduced. Also, the parallel springs () reduce deforming forces applied to sections supporting the driven bar (), and this prevents the driven bar from being damaged. The configuration makes the stage highly accurate and highly reliable.

Stage drive device

In an optical transmission module having a communication module which is freely movable in a case, when a tensile force is generated on an optical cable after connection of an optical transmission module, optical coupling surface and an optical axis center follow each other and thus stable optical transmission can be constantly performed.

Optical transmission module

For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.

Defective product inspection apparatus, probe positioning method and probe moving method

The present invention is related to an optical communication module for transmitting high frequency signals (e.g., 10 Gbit/s and higher data rates) between an optical element and an external circuit. In an illustrative embodiment, the optical communication module includes signal transmission lines and ground lines formed on a ceramic substrate, a flexible wiring board, and a printed circuit board. The widths of the signal lines and the ground lines vary, as well as the spacing between the signal and ground lines. This facilitates characteristic impedance matching among the signal lines to within about 50&#x3a9;.

Optical communication module

A defect inspecting apparatus in which a plurality of probes to measure electric characteristics of a sample including a fine wiring pattern are combined with a charged-particle beam unit includes graphic user interfaces (GUI) to simply control the plural probes. The apparatus includes a probe image processing unit to display the plural probes on a display; a selecting unit to select, from the probes displayed on the display, a probe to be operated; and a display unit to simultaneously display the probe selecting unit and information indicating that the selected probe is an operable probe, or the probe is in a non-selected state.

Defect inspecting apparatus

An optical transmission module includes a housing with a heat radiating fin and a receptacle for being connected to an external optical fiber. The module also includes a coaxial can stem for mounting an optical element and a ceramic printed circuit board. The signal transmission lines are provided on one side of the board, and heat from the coaxial can package is radiated from the radiating fin.

The present invention relates to a scanning electron microscope employing a deceleration field forming technology (retarding), more particularly a scanning electron microscope which separates and detects secondary electrons at high efficiency. The object of the present invention is accomplished by providing an electron source, a lens for condensing the primary electron beam which is emitted from said electron source, a detector for detecting electrons which are generated by radiation of the primary electron beam onto a specimen, a first deceleration means for decelerating the primary electron beam which is radiated onto said specimen, a second deceleration means for decelerating electrons which are generated on the specimen, and a deflector for deflecting said electrons which are decelerated by said second decelerating means.

Scanning electron microscope

A charged particle beam scanning inspecting apparatus for irradiating a charged particle beam, fetching information of a subject to be inspected at a predetermined beam scanning position and performing an inspection by processing the information. The apparatus is a measurer which measures a scanning position of the beam and an inspection position on said inspection subject to calculate beam target coordinates corrected for an apparatus error, an error correction constant and a deflected distortion correction constant, and a deflection controller for scanning the beam. The deflection controller includes a deflection position operating circuit for performing an operation of the inspection position in a deflection coordinate system, a deflected distortion operating circuit. The deflection position operating circuit and deflected distortion operating circuit are constructed in a pipe line fashion.

Charged particle beam scanning type automatic inspecting apparatus

In order that the deflection scanning position can be corrected at a time point within a period for fetching information from a subject to be inspected and improvements in accuracy of chip comparison inspection and an inspection near the wafer outer periphery where distortion is large can be assured by correcting the inspection position and biased distortion at a high speed with high accuracy, a digital deflection control scheme is employed in which the deflection scanning signal and correction are all calculated digitally in a deflection controller for deflecting and controlling a charged particle beam irradiated onto a subject to be inspected and the digital value is sequentially converted into an analog value by a time-series train of digital control signal to form a deflection scanning waveform.

A scanned image to be observed or to be recorded is formed by a plurality of two-dimensional scanning times (N times), an irradiating charged particle beam or a light beam is blanked in a two-dimensional scanning unit, and the averaged irradiation intensity is adjusted by thinning a plurality (&lt;N) of scanning times among the N times of scanning.

Scanning microscope

Console for measurement scanner for semi-conductor

A specimen is scanned with an electron beam so as to generate a signal characteristic of the specimen to thereby produce an image thereof on the basis of the generated signal. A memory is provided for storing operating conditions of a scanning electron microscope which are associated with identification information for specifying the specimen. The identification information is designated so that thereby at least one operating condition corresponding to the designated identification information is read out from the memory, and the read out operating condition is automatically set so that the scanning electron microscope is operated under the set operating condition.

Charged particle beam apparatus and it's operating method

Growing community of inventors

Hitachinaka, Japan

Osamu Yamada