Panasonic Corporation

Panasonic Intellectual Property Management Co., Ltd.

Osamu Matsui

Tsuneichiro Sano

Mitsuo Tanaka

Shuji Tsujino

Masato Oooka

A channel region having a first conductivity type is disposed in a surface portion of a semiconductor substrate. A gate region having a second conductivity type is disposed in a surface portion of the channel region. A first semiconductor region having the second conductivity type is disposed under the channel region. Source/drain regions having the first conductivity type are disposed in parts of the surface portion of the channel region on both sides of the gate region in a channel length direction. Second semiconductor regions each having a high impurity concentration and the second conductivity type are disposed in parts of the semiconductor substrate on both sides of the channel region in a channel width direction.

Semiconductor device

A semiconductor device according to the present invention includes a p-type semiconductor substrate, a first n-type collector diffusion layer formed in the p-type semiconductor substrate, a deep trench formed in the p-type semiconductor substrate so as to surround the first n-type collector diffusion layer, a p-type channel stopper layer formed beneath the deep trench, and an n-type diffusion layer formed between a sidewall of the deep trench and the first n-type collector diffusion layer.

Growing community of inventors

Toyama, Japan

Osamu Matsui