Other

Technion Research & Development Foundation Ltd

Oren Lahav

Amnon Manassen

Roie Volkovich

Liran Yerushalmi

Anna Golotsvan

Oren Cohen

Chen Dror

Nir BenDavid

Pavel Sidorenko

Shlomit Katz

Or Peleg

Rawi Dirawi

Gil Ilan Haham

Bing Kuan Chen

A metrology system includes a controller communicatively coupled to one or more metrology tools, the controller including one or more processors configured to execute program instructions causing the one or more processors to receive one or more metrology measurements of one or more metrology targets of a metrology sample, a metrology target of the one or more metrology targets including one or more target designs with one or more cells, the one or more target designs being generated on one or more layers of the metrology sample; determine one or more errors based on the one or more metrology measurements; and determine one or more correctables to adjust one or more sources of error corresponding to the one or more errors, the one or more correctables being configured to reduce an amount of noise in the one or more metrology measurements generated by the one or more sources of errors.

System and method for error reduction for metrology measurements

A ptychography system is presented for imaging an object located in an object plane. The ptychography system comprises an optical system, and a detection device. The optical system comprises a single shot ptychography arrangement configured and operable to create light response patterns from the object in the object plane on a pixel matrix of the detection device during the same exposure session of the detection device, wherein the optical system further comprises at least one light coding device configured and operable to apply at least one predetermined coding function to at least one of illuminating light and the light response of the object being collected, and said detection device is configured and operable with a predetermined duration of the exposure session during which the pixel matrix detects the collected light, such that image data indicative of the detected light during a single exposure session is in the form of a coded light response of the object being illuminated.

Ptychography based system and method

Growing community of inventors

Adi, Israel

Oren Lahav