Other

Ofer Kadar

Haim Feldman

Avishay Guetta

Doron Korngut

Erez Admoni

Lev Haikoviz

Apparatus for inspection of a sample includes a radiation source, which is adapted to direct optical radiation onto an area of a surface of the sample, and a plurality of image sensors. Each of the image sensors is configured to receive the radiation scattered from the area into a different, respective angular range, so as to form respective images of the area. An image processor is adapted to process at least one of the respective images so as to detect a defect on the surface.

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Jerusalem, Israel

Ofer Kadar