Xwinsys Technology Development Ltd.

Xwinsys Technology Developments Ltd.

Ofek Oiknine

Avishai Shklar

Kiyoshi Ogata

Yeroslav Berezin

Doron Reinis

An X-ray inspection system and method are presented. The system comprising: at least two X-ray sources positioned and oriented at selected angles with respect to an inspection plane, to provide a common illumination spot on said inspection plane, thereby enabling inspection of common regions of a sample with at least one of increased irradiation intensity or two or more different irradiation characteristics while reducing navigation and registration processing.

Dual source X-ray inspection system and method

A sample inspection system is described. The system comprises at least first and second inspection units positioned above a sample region. Each of said at least first and second inspection unit comprises at least one X-ray radiation source and respective detector arrangement and configured for X-ray fluorescent inspection of a sample. Wherein the first and second x-ray inspection units provide first and second inspection properties different in at least one of: bandwidth of emitted X-ray energies, energy of emitted X-rays, spot size of X-ray beam generated on a sample.

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Ramat Yishai, Israel

Ofek Oiknine