Tokyo Electron Limited

Yamaguchi Prefectural Industrial Technology Institute

Sanwa Industry Co., Ltd.

Nobuyuki Nagayama

Hideto Saito

Hikaru Kikuchi

Takehiko Muranaka

Kouji Niimi

Yuuta Ueno

An anodized titanium material includes a titanium base material and an anodized titanium layer. The anodized titanium layer is provided on a surface of the titanium base material. The anodized titanium layer includes a porous first anodized titanium layer. The anodized titanium layer has a withstand voltage at 25° C. of 500 V or more, a Vickers hardness of 200 or more, a film thickness of 20 μm or more and less than 80 μm, an arithmetic average roughness Ra of a surface of less than 1.6 μm, and a maximum height roughness Rz of the surface is less than 6.3 μm. In both of a section perpendicular to a thickness direction of the first anodized titanium oxide layer and the surface, no pore sections having a shape capable of including a circle having a diameter of 0.5 μm or more are observed.

Anodized titanium material and method for producing the same

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Miyagi, Japan

Nobuyuki Nagayama