Otsuka Electronics Co., Ltd.

Nobuyuki Inoue

Kunikazu Taguchi

Yoshi Enami

Shiro Kawaguchi

Yoshihiko Nishida

Toshiki Shinke

Taku Nagashima

An optical characteristics measuring method for measuring optical characteristics of a subject, the optical characteristics measuring method including: a step of acquiring one or more captured images including the subject, using an image capturing apparatus that is located at a predetermined distance from the subject, and is configured to be displaceable relative to the subject, while maintaining the predetermined distance; and a step of creating, based on the one or more captured images thus acquired, a virtual image including the subject and acquired from one or more analysis points each located at a position other than a position on a plane that includes the trajectory of the image capturing apparatus.

Optical characteristics measuring method and optical characteristics measuring system

An optical measurement apparatus includes: a probe including a transmissive optical member having a reference surface, the probe being configured to irradiate a sample with light through the reference surface, and receive a first reflected light from the reference surface, a second reflected light from a front side of the sample, and a third reflected light from a back side of the sample; and a calculator configured to calculate a first distance from the reference surface to the front side of the sample with use of a first reflection interference light to be generated by the first reflected light and the second reflected light, and to calculate a thickness of the sample with use of a second reflection interference light to be generated by the second reflected light and the third reflected light.

Optical measurement apparatus and optical measurement method

There is provided an optical measurement method using a detector having a detection sensitivity to at least a near-infrared region. The optical measurement method including: obtaining an output value by measuring a light sample at any exposure time with the detector; and correcting the output value with an amount of correction corresponding to the output value, when the exposure time at which the output value is obtained is within a second range. The amount of correction includes a product of a coefficient and a square of the exposure time, the coefficient indicating a degree to which an output value obtained when the light sample is measured with the detector at an exposure time within the second range deviates from output linearity obtained when the light sample is measured with the detector at an exposure time within a first range.

Optical measurement method and optical measurement apparatus

An optical measurement method with an optical measurement apparatus including an irradiation optical system and a measurement optical system is provided. The optical measurement method includes obtaining a distribution of actually measured values when angles of incidence are different for the same sample, calculating a modification factor depending on an angle of incidence on the measurement optical system from each measurement point in association with a region in the two-dimensional image corresponding to each measurement point in the measurement target irradiated with the measurement light, and calculating optical characteristics including a refractive index of the sample based on a group of pixel values in one row or a plurality of rows along any one direction in the distribution of the actually measured values and a corresponding modification factor.

An optical measurement apparatus includes an irradiation optical system which linearly irradiates a measurement target with measurement light having a certain wavelength range, a measurement optical system which receives linear measurement interference light which is transmitted light or reflected light originating from the measurement target as a result of irradiation with the measurement light, and a processing device. The processing device includes a first calculation module that calculates a modification factor depending on with an angle of incidence on the measurement optical system from each measurement point in association with a region in the two-dimensional image corresponding to each measurement point in the measurement target irradiated with the measurement light and a second calculation module that calculates optical characteristics of the measurement target by applying the corresponding modification factor to a value for each pixel included in the two-dimensional image.

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Kyoto, Japan

Nobuyuki Inoue