Hitachi-high-technologies Corporation

Nobuo Fujinaga

Akira Ikegami

Yasushi Ebizuka

Yuta Kawamoto

An object of the present disclosure is to provide a charged particle beam apparatus that can quickly find a correction condition for a new aberration that is generated in association with beam adjustment. In order to achieve the above object, the present disclosure proposes a charged particle beam apparatus configured to include an objective lens () configured to focus a beam emitted from a charged particle source and irradiate a specimen, a visual field movement deflector (and) configured to deflect an arrival position of the beam with respect to the specimen, and an aberration correction unit (and) disposed between the visual field movement deflector and the charged particle source, in which the aberration correction unit is configured to suppress a change in the arrival position of the beam irradiated under different beam irradiation conditions.

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Tokyo, Japan

Nobuo Fujinaga