Jsr Corporation

Noboru Otsuka

Hiroshi Tomioka

Yukio Nishimura

Takanori Kawakami

Akimasa Soyano

Makoto Sugiura

Nobuji Matsumura

Ryuichi Serizawa

A radiation-sensitive resin composition includes a polymer and a photoacid generator. The polymer includes a first structural unit shown by a formula (a1), a second structural unit shown by a formula (a2), and a third structural unit having a lactone structure. A content of the first structural unit in the polymer being 50 mol % or more based on total structural units included in the polymer. The first structural unit is preferably a structural unit shown by a formula (a1-1). 

Radiation-sensitive resin composition

A radiation-sensitive resin composition includes (A) an acid labile group-containing resin which becomes alkali-soluble by an action of an acid, (B) a radiation-sensitive acid generator, and (C) a solvent. The resin (A) includes repeating units shown by formulas (1) and (2), wherein Rand Rrepresent a hydrogen atom or a substituted or unsubstituted alkyl group having 1 to 4 carbon atoms, Rrepresents a substituted or unsubstituted alkyl group having 1 to 4 carbon atoms, X represents a hydrogen atom, a hydroxyl group, or an acyl group, m represents an integer from 1 to 18, and n represents an integer from 4 to 8.

A radiation-sensitive resin composition includes a first polymer including a repeating unit represented by a following formula (I). Xis an onium cation. Xin the formula (I) is preferably an onium cation represented by a following formula (1-1), an onium cation represented by a following formula (1-2) or a combination thereof. 

Radiation-sensitive resin composition, polymer, and compound

A radiation-sensitive resin composition includes an acid-dissociable group-containing resin, a radiation-sensitive acid generator, and a solvent. The acid-dissociable group-containing resin includes a copolymer containing a repeating unit. The reparing unit includes an acid-dissociable group-containing repeating unit in an amount of more than about 55 mol % of a total amount of the repeating units in the copolymer. A content of the copolymer in the acid-dissociable group-containing resin is about 90 mass % or more of a total amount of the acid-dissociable group-containing resin.

Growing community of inventors

Tokyo, Japan

Noboru Otsuka