Applied Materials, Inc.

Ningzhuo Cui

Jun Qian

Boguslaw A Swedek

Dominic J Benvegnu

Harry Q Lee

Jeonghoon Oh

Thomas H Osterheld

Jianshe Tang

Kun Xu

Haosheng Wu

Hassan G Iravani

Chih Chung Chou

Hui Chen

Chad Pollard

Patrick A Higashi

Christopher Lai

Eric T Wu

A polishing system includes a platen to hold a polishing pad, a carrier head to hold a substrate against the polishing pad, a conditioner including a conditioner head to hold a conditioner disk against the polishing pad, a motor to move the conditioner head laterally movable relative to the platen, a conditioning disk cleaning station positioned adjacent the platen to clean the conditioning disk, and a controller configured to cause the motor to, during polishing of the substrate, move the conditioner head back and forth between a first position with the conditioner head over the polishing pad and a second position with the conditioner head in the conditioner disk cleaning station.

In-situ conditioner disk cleaning during CMP

A body is brought into contact with a polishing pad of a polishing system, a polishing liquid is supplied to the polishing pad, relative motion between the body and the polishing pad is generated while the body contacts the polishing pad, a signal from an in-situ eddy current monitoring system during the relative motion while the body contacts the polishing pad, generating, and mechanical vibrations in the polishing system are detected based on a signal from the in-situ eddy current monitoring system.

Eddy current monitoring to detect vibration in polishing

A polishing system includes a polishing pad having a solid light-transmissive window, an optical fiber having an end, and a spacer having a vertical aperture therethrough. A bottom surface of the spacer contacts the end of the optical fiber, a top surface of the spacer contacts the underside of the window, and the vertical aperture is aligned with the optical fiber.

Polishing pad and system with window support

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Santa Clara, CA, United States of America

Ningzhuo Cui