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Beijing Keyton Electronic Relay Corporation Ltd.

Ningbo Li

Genglin Wang

Fei Fei Li

Lijun Dong

Liyan Wang

Caiyi Wang

Yongmin Liu

The present invention discloses an improved method of combination test by using argon as gross-leak tracer gas and using helium as fine-leak tracer gas, belongs to the field of hermeticity test. The method is designed to solve the problem that the existing methods are not ideal when the component has lower &#x3c4;and wider range of volume V. The invention comprises step S1 of selecting: using helium-argon prefilling method for the first hermeticity test and helium-argon pressuring method after helium-argon prefilling for repetitive hermeticity test, or using helium-argon pressuring method after argon prefilling for the first hermeticity test and helium-argon multi-pressuring method after argon prefilling for repetitive hermeticity tests. The improved method extends the maximum detection-waiting time, effectively prevents detection missing and misjudges in gross-leak/fine-leak test, and solves the detection problems on applicability, feasibility and credibility.

Combination test method by using argon as gross-leak test tracer gas and using helium as fine-leak test tracer gas

A method for helium mass spectrometric fine-leak test is based on quantitative determination of maximum test-waiting time, which gives a method for quantitative determination of the maximum test-waiting time for fine-leak test during a helium mass spectrometric test process of the sealability, and gives a method for determining the criterion for measured leak rate by taking the minimum helium gas exchange time constant, i.e., a rigour grade &#x3c4;, of an acceptable sealed electronic component as a basic criterion for helium mass spectrometric fine-leak test. Based on the inventive method for quantitative determination of the maximum test-waiting time, for most of the cavity volume ranges, the maximum test-waiting time that is determined accurately may be much longer than 1 hour or 0.5 hour as determined qualitatively by the existing related standards.

Method for helium mass spectrometric fine-leak test based on quantitative determination of maximum test-waiting time

The present invention discloses a method of cumulative helium mass spectrometric combination test by using argon gas as gross-leak tracer gas, and specifically gives the procedure for this gross-leak and fine-leak combination test, comprising steps and methods of selecting helium-argon prefilling method or helium-argon pressuring method, fixed or flexible scheme and the criterion Rfor argon measured leak rate of gross-leak test according to the rigour grade T, cavity volume, leak rate of surficially absorbed helium and argon and the history of the test of a component under test; designing time for pressuring of helium-argon pressuring method, the maximum test-waiting time of fine-leak test and the criterion for helium measured leak rate, helium-argon prefilling and helium-argon pressuring, removing absorbed helium and argon gas, gross-leak test, fine-leak test and complementally testing bigger gross leak, which enhances the sensitivity of gross-leak test, lengthens the maximum test-waiting time of fine-leak test, tremendously expands the range of adapted cavity volume and criterion for measured leak rate of fine-leak test, thus making the cumulative helium mass spectrometric combination test more applicable, convenient and practical.

Method of cumulative helium mass spectrometric combination test by using argon as gross-leak tracer gas

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Beijing, China

Ningbo Li