Kla Corporation

Nick Petrone

Abdurrahman Sezginer

Hong Xiao

Alan D Brodie

Lawrence Muray

Grace Hsiu-Ling Chen

John Gerling

Qiang Q Zhang

Kuljit Virk

A system is disclosed. In one embodiment, the system includes a scanning electron microscopy sub-system including an electron source configured to generate an electron beam and an electron-optical assembly including one or more electron-optical elements configured to direct the electron beam to the specimen. In another embodiment, the system includes one or more grounding paths coupled to the specimen, the one or more grounding paths configured to generate one or more transmission signals based on one or more received electron beam-induced transmission currents. In another embodiment, the system includes a controller configured to: generate control signals configured to cause the scanning electron microscopy sub-system to scan the portion of the electron beam across a portion of the specimen; receive the transmission signals via the one or more grounding paths; and generate transmission current images based on the transmission signals.

Defect inspection and review using transmissive current image of charged particle beam system

Growing community of inventors

Milpitas, CA, United States of America

Nick Petrone