Semiconductor Diagnostics, Inc.

Nick Kochey

Jacek J Lagowski

Alexandre Savtchouk

Piotr Edelman

Frank Gossett

Techniques for measuring a contact potential difference of a sample at an elevated temperature using a probe designed for room temperature measurement are disclosed. In such measurements, probe damage by excessive heating can be prevented without any probe modifications to include probe cooling. This can be achieved by minimizing the time the probe spends in close proximity to the heated sample. Furthermore, the effect of probe heating by the sample on the probe reading can be corrected by including an additional contact potential difference measurement of a reference plate kept at room temperature in the measurement cycle.

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St. Petersburg, FL, United States of America

Nick Kochey