International Business Machines Corporation

Globalfoundries Inc.

Myung-Hee Na

Edward J Nowak

Ravikumar Ramachandran

Albert Manhee Chu

Balasubramanian Pranatharthiharan

Kangguo Cheng

Brent A Anderson

Ramachandra Divakaruni

Injo Ok

Henry K Utomo

Nicole A Saulnier

Huiling Shang

Lawrence Alfred Clevenger

Dechao Guo

Terence B Hook

Shu-Jen Han

Andres Bryant

Kern Rim

Michael Patrick Chudzik

Brian Joseph Greene

Robert C Wong

Emre Alptekin

Sean David Burns

William K Henson

Edward P Maciejewski

Yue Liang

Xiaojun Yu

Eric Eastman

Jens Haetty

Ximeng Guan

Tenko Yamashita

Qintao Zhang

Thomas A Wallner

Seong-Dong Kim

Jin Zheng Wallner

Andreas Scholze

Scott Keith Springer

Steven G Lovejoy

Sim Y Loo

A method for forming a device structure provides for forming a fin of a semiconductor material. A first contact is formed on the fin. A second contact is formed on the fin and spaced along a length of the fin from the first contact. A self-aligned gate electrode is formed on the fin that is positioned along the length of the fin between the first contact and the second contact.

Contact-first field-effect transistors

A Phase-change-memory (PCM) cell and method of forming the PCM are provided. In an illustrative embodiment, a method of forming a PCM cell includes forming a first layer of a first germanium-antimony-tellurium (GST) type material over at least a portion of the bottom and sides of a pore through a dielectric layer of low dielectric material to a bottom electrode. The method also includes forming a second layer of a second GST type material over the first GST type material along the bottom and sides of the pore over the bottom electrode. The first GST type material is different from the second GST type material.

Structure and method to form bi-layer composite phase-change-memory cell

Techniques are provided to fabricate semiconductor integrated circuit devices which include complementary metal-oxide-semiconductor gate-all-around field-effect transistor devices (e.g., nanosheet field-effect transistor devices), wherein the channel orientation layout of N-type and P-type field-effect transistor devices are independently configured to provide enhanced carrier mobility in the channel layers of the different type field-effect transistor devices.

Channel orientation of CMOS gate-all-around field-effect transistor devices for enhanced carrier mobility

A self-align metal contact for a phase control memory (PCM) element is provided that mitigates unwanted residual tantalum nitride (TaN) particles that would otherwise remain after patterning a TaN surface using an RIE process.

Structure and method to form phase change memory cell with self- align top electrode contact

A method of forming a self-aligned phase change memory element is provided. A bottom electrode is formed on a landing pad of a phase change memory element. A layer of dielectric material over the bottom electrode and a via etched through the dielectric material to expose the bottom electrode. The via is lined with a GST phase change layer that is etched back from the top surface of the dielectric layer. The via is then filled with a nitride fill, at least of portion of which is etched back from the top surface of the dielectric layer. A top electrode metal is then deposited at the top of the via, wherein the top electrode material is coupled to the phase change material and nitride fill material.

Self-aligned high density and size adjustable phase change memory

A method for manufacturing a semiconductor device comprises forming a plurality of fins in an active region, forming a plurality of gates around the plurality of fins in the active region, forming one or more gate contacts in the active region, and forming a plurality of contacts to source/drain regions in the active region.

Reliable gate contacts over active areas

A technique relates to a circuit. At least one 4 transistor (4T) static random access memory (SRAM) bitcell is included. Each of the 4T SRAM bitcells includes a first PFET, a first NFET, a second PFET, and a second NFET, the first PFET and the first NFET being coupled to form a first output node, and the second PFET and the second NFET being coupled to form a second output node. A pulldown circuit is coupled to the first NFET, the pulldown circuit operable to pull down a voltage at the first output node. A feedback circuit is operable to monitor the first output node, the feedback circuit operable to control the pulldown circuit.

4T static random access memory bitcell retention

A method is presented for forming a layout of a MOSFET (metal oxide semiconductor field effect transistor) circuit. The method includes forming a plurality of gate conductors, forming a plurality of active areas, and forming at least one gate contact (CB contact) within an active region of the plurality of active regions. The method further includes placing a marker over the at least one gate contact to identify a location of the at least one gate contact. Additionally, a distance between the at least one gate contact and at least one TS contact is optimized based on device specifications.

Standard cell architecture with at least one gate contact over an active area

A technique relates to a method of optimizing self-aligned double patterning. Predefined locations for required metal cuts are provided in order to form metal wires from metal fills that have been cut. Extended locations for extended metal cuts are provided in order to cut adjacent metal fills. The adjacent metal fills are the metal fills that are adjacent to the predefined locations for the required metal cuts, and the extended metal cuts extend beyond the required metal cuts. The required metal cuts into the metal fills are performed and the extended metal cuts into the adjacent metal fills are performed.

Metal fill optimization for self-aligned double patterning

Ultra dense and stable 4T SRAM designs are provided. In one aspect, a 4T SRAM bitcell includes: two NFETs cross-coupled with two PFETs, wherein the NFETs are both connected directly to a word line, wherein a first one of the PFETs is connected to a first bit line via a first one of the NFETs and a second one of the PFETs is connected to a second bit line via a second one of the NFETs, and wherein the PFETs are each separately connected to ground. An SRAM device including the present 4T SRAM bitcell as well as a method of operating the SRAM device are also provided.

Ultra dense and stable 4T SRAM cell design having NFETs and PFETs

Methods form complementary metal oxide semiconductor (CMOS) devices that include a first transistor and a complementary second transistor, and an output connected to the first transistor and the second transistor. The first transistor includes a first channel region, a first back gate, a first delay element between the output and the first back gate, and a first back gate insulator separating the first back gate from the first channel region. The second transistor includes a second channel region, a second back gate, a second delay element between the output and the second back gate, and a second back gate insulator separating the second back gate from the second channel region. The first delay element, the first back gate insulator, and the first channel region form a first resistor-capacitor (RC) circuit, and the second delay element, the second back gate insulator, and the second channel region form a second RC circuit.

Field effect transistor having delay element with back gate

A fin structure includes an optional doped well, a disposable single crystalline semiconductor material portion, and a top semiconductor portion formed on a substrate. A disposable gate structure straddling the fin structure is formed, and end portions of the fin structure are removed to form end cavities. Doped semiconductor material portions are formed on sides of a stack of the disposable single crystalline semiconductor material portion and a channel region including the top semiconductor portion. The disposable single crystalline semiconductor material portion may be replaced with a dielectric material portion after removal of the disposable gate structure or after formation of the stack. The gate cavity is filled with a gate dielectric and a gate electrode. The channel region is stressed by the doped semiconductor material portions, and is electrically isolated from the substrate by the dielectric material portion.

Strained finFET with an electrically isolated channel

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Lagrangeville, NY, United States of America

Myung-Hee Na