Rohm & Haas Electronic Materials LLC

Mutsuko Saito

Shinjiro Hayashi

Makoto Sakai

Toshiyuki Morinaga

Yoko Mizuno

A copper electroplating solution which contains compounds with the structure &#x2014;X&#x2014;S&#x2014;Y&#x2014; wherein X and Y are, independently atoms selected from a group consisting of hydrogen, carbon, sulfur, nitrogen, and oxygen, and X and Y can be the same only if they are carbon atoms and ninhydrin. By using this copper electroplating solution, it is possible to form good filled vias without worsening the appearance of the plating.

Copper electroplating solution and method of copper electroplating

An electrolytic copper plating solution is provided which has an excellent via filling ability without using formaldehyde, which is harmful to the environment. An electrolytic copper plating solution which contains compounds which have an &#x2014;X&#x2014;S&#x2014;Y&#x2014; structure wherein X and Y are individually atoms selected from a group comprising hydrogen, carbon, sulfur, nitrogen, and oxygen atoms and X and Y can be the same only when they are carbon atoms and specific nitrogen-containing compounds. Good filled vias can be made without causing a worsening of the exterior appearance of the plating by using this electrolytic copper plating solution.

Electrolytic copper plating solution and method of electrolytic copper plating

Copper electroplating liquid which does not use formaldehyde, which is harmful to the environment, and which exhibits excellent via filling ability is offered. The copper electroplating liquid of this invention includes the compound that has the structure of &#x2014;X&#x2014;S&#x2014;Y&#x2014; where X and Y are each an atom selected from the group of hydrogen atoms, carbon atoms, sulfur atoms, nitrogen atoms and oxygen atoms, and X and Y can be the same only when they are carbon atoms, and a specific urea derivative. When the copper electroplating liquid is used, deterioration of the appearance will not occur and a good filled via can be formed.

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Niigata, Japan

Mutsuko Saito