Tokyo Electron Limited

Tokyo Electron Limi Ted

Muneyuki Omi

Takahiro Murakami

Dai Igarashi

Rei Ibuka

Taku Gohira

Wataru Takayama

Takayuki Suzuki

A substrate processing method includes preparing a substrate including an etching target film and a mask; etching the etching target film through the mask by plasma; and heat-treating the substrate at a preset temperature after the etching of the etching target film.

Substrate processing method, substrate processing apparatus and cleaning apparatus

A plasma processing method includes: plasma-processing a substrate placed on a surface of a placement table while causing a coolant of 0&#xb0; C. or lower to flow through a coolant flow path formed inside the table; placing a dummy substrate on the surface of the placement table in place of the substrate; and removing a reaction product generated due to the plasma processing of the substrate by the plasma of the processing gas from a peripheral edge portion of the surface of the placement table while heating the surface of placement table by the plasma of the processing gas via the dummy substrate in a state where the dummy substrate is placed on the surface of the placement table.

Plasma processing method and plasma processing apparatus

A plasma processing method capable of reducing an amount of deposit adhering to an upper electrode or removing the deposit from the upper electrode is provided. In the plasma processing method, the upper electrode of a capacitively coupled plasma processing apparatus is cooled. A supporting table including a lower electrode is provided within a chamber of the plasma processing apparatus. The upper electrode is provided above the supporting table. During the cooling of the upper electrode, a film of a substrate is etched by plasma generated within the chamber. The substrate is placed on the supporting table during the etching of the film. A negative bias voltage is applied to the upper electrode while the etching is being performed.

Plasma processing method

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Miyagi, Japan

Muneyuki Omi