Si-ware Systems

Muhammad Nagi

Bassam Amanallah Saadany

Yasser M Sabry

Bassem Mortada

Mostafa Medhat

Diaa A Khalil

Ahmed Shebl

Diaa Kahlil

Aspects relate to an integrated optical probe card and a system for performing wafer testing of optical micro-electro-mechanical systems (MEMS) structures with an in-plane optical axis. On-wafer optical screening of optical MEMS structures may be performed utilizing one or more micro-optical bench components to redirect light between an out-of-plane direction that is perpendicular to the in-plane optical axis to an in-plane direction that is parallel to the in-plane optical axis to enable testing of the optical MEMS structures with vertical injection of the light.

Integrated optical probe card and system for batch testing of optical MEMS structures with in-plane optical axis using micro-optical bench components

Growing community of inventors

Cairo, Egypt

Muhammad Nagi