Lam Research Corporation

Alza Corporation

Monique Ben-Dor

Brian K McMillin

Paul K Shufflebotham

Alex T Demos

Huong Nguyen

Michael S Barnes

Robert M Gale

Butch Berney

Nancy Keller

A plasma cleaning method for removing deposits in a CVD chamber. The method includes introducing a cleaning gas comprising a fluorine-based gas into the chamber. A plasma is formed by exposing the cleaning gas to an inductive field generated by resonating a radio frequency current in a RF antenna coil. A plasma cleaning step is performed by contacting interior surfaces of the chamber with the plasma for a time sufficient to remove the deposits on the interior surfaces. An advantage of the plasma cleaning method is that it allows for in-situ cleaning of the chamber at high rates, thereby effectively reducing equipment downtime. The method has particular applicability in the cleaning of a PECVD process chamber.

Method of depositing a silicon containing layer on a semiconductor substrate

A method of depositing a dielectric film on a substrate in a process chamber of an inductively coupled plasma-enhanced chemical vapor deposition reactor. Gap filling between electrically conductive lines on a semiconductor substrate and depositing a cap layer are achieved. Films having significantly improved physical characteristics including reduced film stress are produced by heating the substrate holder on which the substrate is positioned in the process chamber.

Inductively coupled plasma CVD

An ocular system is disclosed for dispensing a medication formulation to the eye. The system comprises a formulation consisting of a pilocarpine osmotic solute and an epinephrine osmotic solute dispersed in a polymer such that the formulation is surrounded substantially individually by the polymer. The system, when placed in the eye, dispenses the formulation at a controlled rate over time. A method also is disclosed for the management of intraocular pressure using the ocular system.

Ocular therapeutic system for dispensing a medication formulation

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Palo Alto, CA, United States of America

Monique Ben-Dor