Hitachi-High-Technologies Corporation

Hitachi High-Tech Corporation

Mitsugu Yamashita

Masaki Takano

Yayoi Konishi

Tohru Ando

Kunji Shigeto

Naoko Ushio

Shoutarou Tamayama

In the case of an in situ observation with a charged particle beam apparatus, an observer who is not an expert in the charged particle beam apparatus needs to maintain the field of view of the observation that changes from moment to moment while watching a monitor, and thus, adjustment of the field of view needs to be controllable in real time with a good operability. In order to eliminate the need for an observer to move the line of sight, a live image and a comparison image are overlapped and displayed. At this time, an interface is devised, such that overlapping of two images can be executed without giving stress to the observer. The observer presses a button on an operation screen, thereby displaying a superimposed image, which is obtained by making the comparison image matching the size of a first display area configured to display the live image translucent and superimposing the translucent comparison image on the live image, at the position of the first display area of the image display device.

Charged particle beam apparatus and sample observation method using superimposed comparison image display

The movement distance of a second adjustment slideris made shorter than that of a first adjustment sliderif the first adjustment slideris positioned in a displayed range, except at both ends thereof, of a set value adjustment axisin a first set value adjustment axis display part. The first adjustment slideris kept unmoved while the second adjustment slideralone is moved in the direction of one of both ends of the displayed range if the first adjustment slideris positioned at least at the one of both ends of the displayed range of the set value adjustment axisin the first set value adjustment axis display part, if the second adjustment slideris also positioned in the displayed range except at the both ends thereof, and if the first adjustment slideris to be selectively operated by a cursor. This structure allows coarse and fine adjustments of set values for operation control to be carried out easily and accurately.

Charged particle beam apparatus and program

Growing community of inventors

Tokyo, Japan

Mitsugu Yamashita