Tetramem Inc.

Hewlett-packard Development Company, L.p.

Hewlett Packard Enterprise Development LP

Other

Tetramen Inc.

Minxian Max Zhang

Ning Ge

Jianhua Yang

Richard Stanley Williams

Gilberto Medeiros Ribeiro

Zhiyong Li

Alexandre M Bratkovski

Matthew D Pickett

Wei Yi

Mingche Wu

Katy Samuels

Shih-Yuan Wang

David A Fattal

Julien Borghetti

Feng Miao

Byungjoon Choi

Lu Zhang

Gilberto Medeiros Riberio

R Stanley Williams

Stanley R Williams

In accordance with some embodiments of the present disclosure a tunneling-based selector is provided. The selector includes a multilayer barrier structure fabricated between a first electrode and a second electrode. The multilayer barrier structure includes a first layer of a first van der Waals (vdW) material; a second layer of a second vdW material; and a third layer of a third vdW material. The first layer of the first vdW material is fabricated between the second layer of the second vdW material and the third layer of the third vdW material. The electron affinity of the first layer of the first vdW material is lower than the second electron affinity of the second layer of the second vdW material and the electron affinity of the third layer of the vdW material.

Tunneling-based selectors incorporating van der Waals (vdW) materials

Technologies relating to RRAM crossbar array circuits with specialized interface layers for the low current operations are disclosed. An example apparatus includes: a substrate; a bottom electrode formed on the substrate; a first layer formed on the bottom electrode; an RRAM oxide layer formed on the first layer and the bottom electrode; and a top electrode formed on the RRAM oxide layer. The first layer may be a continuous layer or a discontinuous layer. The apparatus may further comprise a second layer formed between the RRAM oxide layer and the top electrode. The second layer may be a continuous layer or a discontinuous layer.

Methods for fabricating RRAM crossbar array circuits with specialized interface layers for low current operation

A crossbar circuit including a crossbar array and a periphery circuit is provided. A resistive random-access memory (RRAM) device of the crossbar array includes a bottom electrode fabricated on a first interconnect layer; a top electrode; and a filament-forming layer fabricated between the bottom electrode and the top electrode. A portion of the filament-forming layer and a portion of the top electrode are fabricated in a via in a first etch stop layer. The crossbar circuit further includes a second etch stop layer fabricated on the top electrode and a dielectric layer fabricated on the second etch stop layer. The top electrode is connected to a first metal via of a second interconnect layer fabricated in the second etch stop layer and the dielectric layer. The periphery circuit includes a metal via of the second interconnect layer that is fabricated in the dielectric layer and the first etch stop layer.

CMOS-compatible resistive random-access memory devices with a via device structure

In accordance with some embodiments of the present disclosure, a memory device is provided. The memory may include a ferroelectric layer including a ferroelectric material interstitially doped with at least one interstitial dopant. The ferroelectric material may include a metal oxide. The interstitial dopant may include an element having an atomic radius that is not greater than an atomic radius of a metal element of the metal oxide. In some embodiments, the metal oxide comprises at least one of hafnium or zirconium. The memory device may be non-volatile. The memory device may be a ferroelectric capacitor (FeCAP), a ferroelectric field-effect transistor (FeFET), a ferroelectric tunneling junction (FTJ), and/or another form of ferroelectric random-access memory (Fe-RAM).

Ferroelectric non-volatile memory devices

The present disclosure relates to resistive random-access memory (RRAM) devices. A method for fabricating resistive random-access memory (RRAM) device may include fabricating, on a first electrode of the RRAM device, a first interface layer comprising a first discontinuous film of a first material; fabricating, on the first interface layer, a switching oxide layer comprising at least one transition metal oxide; fabricating a second interface layer on the switching oxide layer; and fabricating a defect engineering layer on the second interface layer. The first material is more chemically stable than the at least one transition metal oxide. The defect engineering layer includes a layer of Ti in some embodiments.

Resistive random-access memory devices with engineered electronic defects and methods for making the same

The present disclosure relates to resistive random-access memory (RRAM) devices. An RRAM device may include a first electrode, a first interface layer fabricated on the first electrode; a switching oxide layer fabricated on the first interface layer; and a second electrode fabricated on the switching oxide layer. The switching oxide layer includes a transition metal oxide. The first interface layer includes a discontinuous film of a first material that is more chemically stable than the transition metal oxide. The RRAM device may further include a second interface layer positioned between the switching oxide layer and the second electrode. The second interface layer includes a discontinuous film of a second material that is more chemically stable than the transition metal oxide. The second electrode may include multiple electrode components that may include an alloy, a first layer of a first metallic material, and/or a second layer of a second metallic material.

Resistive random-access memory devices with multi-component electrodes and discontinuous interface layers

The present disclosure relates to resistive random-access memory (RRAM) devices. In some embodiments, a RRAM device may include a first electrode; a second electrode comprising an alloy containing tantalum; and a switching oxide layer positioned between the first electrode and the second electrode, wherein the switching oxide layer includes at least one transition metal oxide. The alloy containing tantalum may further contain at least one of hafnium, molybdenum, tungsten, niobium, or zirconium. In some embodiments, the alloy containing tantalum may include one or more of a binary alloy containing tantalum, a ternary alloy containing tantalum, a quaternary alloy containing tantalum, a quinary alloy containing tantalum, a senary alloy containing tantalum, and a high order alloy containing tantalum.

Resistive random-access memory devices with multi-component electrodes

The present disclosure provides for a semiconductor device with integrated sensing and processing functionalities. The semiconductor device includes a sensing module configured to generate a plurality of analog sensing signals; and a machine learning (ML) processor. The sensing module and the ML processor are fabricated on a single wafer. The ML processor includes crossbar arrays that processes the analog sensing signals to generate analog preprocessed sensing data; an analog-to-digital converter (ADC) to convert the analog preprocessed sensing data into digital preprocessed sensing data; and a machine learning processing unit to process the digital preprocessed sensing data utilizing one or more machine learning model.

Integrated sensing and machine learning processing devices

The present disclosure relates to resistive random-access memory (RRAM) devices. In some embodiments, a RRAM device may include a first electrode, a second electrode, and a switching oxide layer positioned between the first electrode and the second electrode, wherein the switching oxide layer comprises at least one transition metal oxide. The second electrode may include a first layer comprising a first metallic material and a second layer comprising a second metallic material. In some embodiments, the first metallic material and the second metallic material may include titanium and tantalum, respectively. In some embodiments, the second electrode may include an alloy of tantalum. The alloy of tantalum may contain one or more of hafnium, molybdenum, niobium, tungsten, and/or zirconium. In some embodiments, the alloy of tantalum contains a plurality of alloys of tantalum.

A method for fabricating a forming-free resistive random-access memory (RRAM) device is provided. The method includes: fabricating an RRAM cell and annealing the RRAM cell. The RRAM cell includes: a bottom electrode, a switching oxide layer comprising at least one transition metal oxide; a top electrode, and an interface between the switching oxide layer and the top electrode. In some embodiments, the at least one transition metal oxide includes at least one of HfOor TaO, wherein x≤2.0, and wherein y≤2.5. The interface layer comprises a layer of at least one of AlO, MgO, YO, or LaO. The forming-free RRAM device may be switched to multiple resistance levels without a forming process.

Forming-free random-access memory (RRAM) devices

The present disclosure provides an apparatus, including: a substrate; a bottom electrode formed on the substrate; a first base oxide layer formed on the bottom electrode; a first geometric confining layer formed on the first base oxide layer, wherein the first geometric confining layer comprises a first plurality of pin-holes; a second base oxide layer formed on the first geometric confining layer and connected to a first top surface of the first base oxide layer via the first plurality of pin-holes; and a top electrode formed on the second base oxide layer. The first base oxide layer includes TaOx, HfOx, TiOx, ZrOx, or a combination thereof. The first geometric confining layer comprises AlO, SiO, SiN, YO, GdO, SmO, CeO, ErO, or a combination thereof.

Low current RRAM-based crossbar array circuits implemented with interface engineering technologies

The present application provides an apparatus, including: a substrate; a first line electrode formed on the substrate; an interlayer formed on the first line electrode, a selector stack formed on the interlayer and the first line electrode; an RRAM stack formed on the selector stack; and a second line electrode formed on the RRAM stack. The interlayer comprises an upper surface and a sidewall. In some embodiments, a shape of the interlayer comprises a cylinder, a pyramid, a prism, a cone, a pillar, or a protrusion.

Increasing selector surface area in crossbar array circuits

Methods for fabricating resistive random-access memory stacks

Switching oxide engineering technologies relating to low current RRAM-based crossbar array circuits are disclosed. An apparatus, in some implementations, includes: a substrate; a bottom electrode formed on the substrate; a switching oxide stack formed on the bottom electrode. The switching oxide stack includes one or more base oxide layers and one or more discontinuous oxide layers alternately stacked; An apparatus further includes a top electrode formed on the switching oxide stack. The base oxide layer includes TaO, HfO, TiO, ZrO, or a combination thereof. The discontinuous oxide layer includes AlO, SiO, SiN, YO, GdO, SmO, CeO, ErO, or the combination thereof.

Low current RRAM-based crossbar array circuit implemented with switching oxide engineering technologies

Technologies relating to increasing the surface area of selectors in crossbar array circuits are provided. An example apparatus includes: a substrate; a first line electrode formed on the substrate; an RRAM stack formed on the first line electrode, wherein the RRAM stack; an isolation layer formed beside the RRAM stack, wherein the isolation layer includes an upper surface and a sidewall, and a height from the upper surface to the first line electrode is 100 nanometers to 10 micrometers; a selector stack formed on the RRAM stack, the sidewall, and the upper surface; and a second line electrode formed on the selector stack.

Growing community of inventors

Palo Alto, CA, United States of America

Minxian Max Zhang