Kabushiki Kaisha Nihon Micronics

Minoru Sato

Yuki Saito

Michitaka Okuta

Hisao Narita

Toshinaga Takeya

Shou Harako

Jukiya Fukushi

A connecting device for inspection includes a probe head configured to hold electric contacts and optical contacts such that tip ends of the respective contacts are exposed on a lower surface of the probe head while proximal ends of the electric contacts are exposed on an upper surface of the probe head and the optical contacts are fixed to the probe head, and a transformer including connecting wires provided therein such that tip ends on one side of the connecting wires electrically connected to the proximal ends of the electric contacts exposed on the upper surface of the probe head are arranged in a lower surface of the transformer while the optical contacts slidably penetrate the transformer. A positional relationship between the tip end of the respective electric contacts and the tip end of the respective optical contacts on the lower surface of the probe head corresponds to a positional relationship between an electrical signal terminal and an optical signal terminal of a semiconductor device. The optical contacts continuously penetrate the probe head and the transformer.

Connecting device for inspection

A connecting device for inspection includes a probe head configured to hold electric contacts and optical contacts such that tip ends of the respective contacts are exposed on a lower surface of the probe head, and a transformer including connecting wires arranged therein and optical wires penetrating therethrough. The respective proximal ends of the electric contacts and the optical contacts are exposed on an upper surface of the probe head, and tip ends on one side of the connecting wires electrically connected to the proximal ends of the electric contacts and connecting ends of the optical wires optically connected to the proximal ends of the optical contacts are arranged in a lower surface of the transformer. A positional relationship between the tip end of the respective electric contacts and the tip end of the respective optical contacts on the lower surface of the probe head corresponds to a positional relationship between an electrical signal terminal and an optical signal terminal of a semiconductor device.

An optical probe receives an optical signal output from a test subject. The optical probe includes an optical waveguide composed of a core portion and a cladding portion disposed on an outer periphery of the core portion, wherein an incident surface of the optical waveguide, which receives the optical signal, is a convex spherical surface with a constant curvature radius.

Optical probe, optical probe array, test system and test method

A connecting device for inspection includes optical probes, and a probe head including a plurality of guide plates. The probe head includes a first guide plate, and a second guide plate arranged movably with respect to the first guide plate in a radial direction of the penetration holes in a state in which the optical probes are inserted to the respective penetration holes. The probe head holds the optical probes by inner wall surfaces of the penetration holes of the first guide plate and inner wall surfaces of the penetration holes of the second guide plate in a state in which the positions of the central axes of the penetration holes of the first guide plate are shifted in the radial direction from the positions of the central axes of the penetration holes of the second guide plate.

A probe is provided with a linear main body portion having a tip in contact with an electrode of a member to be tested in a state where a board-side end is in contact with the circuit board side of a probe card. An elastic support portion is provided on a board-side end portion of the main body portion and elastically supports the main body portion on the probe card side. The support portion has its base end side integrally fixed to the board-side end portion and is formed with the distal end side directed toward the tip portion of the main body portion and curved having an arc shape toward the main body portion side. Two pieces of the support portion are provided symmetrically on both sides sandwiching the board-side end portion and are configured by being curved, each having an arc shape with the same radius of curvature.

Probe and probe card

The electrical connecting apparatus according to the present invention includes first, second and third plate members having plate-like portions at intervals from each other in the thickness direction, each plate-like member having a plurality of through holes in the plate-like portions; and a plurality of probes having projected portions passed through the through holes of the first, second and third plate-like members, the probes including projected portions between said first and second plate-like members. Each through hole of the first and second plate-like members has a small diameter portion for preventing the projected portion of the probe from passing and a large diameter portion communicated to the small diameter portion.

Growing community of inventors

Aomori, Japan

Minoru Sato